3/6/2011	9:38:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	9:38:04 AM	Recipe started at 9:38 AM
3/6/2011	9:38:04 AM	Helium valve closed
3/6/2011	9:38:04 AM	H2 valve closed
3/6/2011	9:38:04 AM	BCl3 valve closed
3/6/2011	9:38:04 AM	PH3 valve closed
3/6/2011	9:38:04 AM	SiCl4 pre valve closed
3/6/2011	9:38:04 AM	SiCl4 post valve closed
3/6/2011	9:38:04 AM	Main Vac valve closed
3/6/2011	9:38:04 AM	Bubbler valve closed
3/6/2011	9:38:04 AM	Bypass valve opened
3/6/2011	9:38:04 AM	Helium MFC set to  0.000000
3/6/2011	9:38:04 AM	H2 MFC set to  0.000000
3/6/2011	9:38:04 AM	BCl3 MFC set to  0.000000
3/6/2011	9:38:04 AM	PHl3 MFC set to  0.000000
3/6/2011	9:38:04 AM	SiCl4 MFC set to  0.000000
3/6/2011	9:38:04 AM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:38:04 AM	Tube furnace set to 0
3/6/2011	9:38:04 AM	Helium valve closed
3/6/2011	9:38:04 AM	H2 valve closed
3/6/2011	9:38:04 AM	BCl3 valve closed
3/6/2011	9:38:04 AM	PH3 valve closed
3/6/2011	9:38:04 AM	SiCl4 pre valve closed
3/6/2011	9:38:04 AM	SiCl4 post valve closed
3/6/2011	9:38:04 AM	Bubbler valve closed
3/6/2011	9:38:04 AM	Main Vac valve opened
3/6/2011	9:38:04 AM	Bypass valve opened
3/6/2011	9:38:04 AM	Helium MFC set to  0.000000
3/6/2011	9:38:04 AM	H2 MFC set to  0.000000
3/6/2011	9:38:04 AM	BCl3 MFC set to  0.000000
3/6/2011	9:38:04 AM	PHl3 MFC set to  0.000000
3/6/2011	9:38:04 AM	SiCl4 MFC set to  0.000000
3/6/2011	9:38:04 AM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:38:04 AM	Tube furnace set to 0
3/6/2011	9:38:04 AM	Run finished at 9:38 AM
3/6/2011	9:38:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	2:40:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2011	2:40:12 PM	Recipe started at 2:40 PM
3/6/2011	2:40:12 PM	H2 valve closed
3/6/2011	2:40:12 PM	BCl3 valve closed
3/6/2011	2:40:12 PM	PH3 valve closed
3/6/2011	2:40:12 PM	SiCl4 pre valve closed
3/6/2011	2:40:12 PM	SiCl4 post valve closed
3/6/2011	2:40:12 PM	Main Vac valve closed
3/6/2011	2:40:12 PM	Bypass valve closed
3/6/2011	2:40:12 PM	Bubbler valve closed
3/6/2011	2:40:12 PM	Helium valve opened
3/6/2011	2:40:12 PM	Helium MFC set to  500.000000
3/6/2011	2:40:12 PM	H2 MFC set to  0.000000
3/6/2011	2:40:12 PM	BCl3 MFC set to  0.000000
3/6/2011	2:40:12 PM	PHl3 MFC set to  0.000000
3/6/2011	2:40:12 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:40:12 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:40:12 PM	Tube furnace set to 0
3/6/2011	2:41:33 PM	Helium valve closed
3/6/2011	2:41:33 PM	H2 valve closed
3/6/2011	2:41:33 PM	BCl3 valve closed
3/6/2011	2:41:33 PM	PH3 valve closed
3/6/2011	2:41:33 PM	SiCl4 pre valve closed
3/6/2011	2:41:33 PM	SiCl4 post valve closed
3/6/2011	2:41:33 PM	Main Vac valve closed
3/6/2011	2:41:33 PM	Bypass valve closed
3/6/2011	2:41:33 PM	Bubbler valve closed
3/6/2011	2:41:33 PM	Helium MFC set to  0.000000
3/6/2011	2:41:33 PM	H2 MFC set to  0.000000
3/6/2011	2:41:33 PM	BCl3 MFC set to  0.000000
3/6/2011	2:41:33 PM	PHl3 MFC set to  0.000000
3/6/2011	2:41:33 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:41:33 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:41:33 PM	Tube furnace set to 0
3/6/2011	2:41:33 PM	Run finished at 2:41 PM
3/6/2011	2:41:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2011	2:48:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	2:48:15 PM	Recipe started at 2:48 PM
3/6/2011	2:48:15 PM	Helium valve closed
3/6/2011	2:48:16 PM	H2 valve closed
3/6/2011	2:48:16 PM	BCl3 valve closed
3/6/2011	2:48:16 PM	PH3 valve closed
3/6/2011	2:48:16 PM	SiCl4 pre valve closed
3/6/2011	2:48:16 PM	SiCl4 post valve closed
3/6/2011	2:48:16 PM	Main Vac valve closed
3/6/2011	2:48:16 PM	Bubbler valve closed
3/6/2011	2:48:16 PM	Bypass valve opened
3/6/2011	2:48:16 PM	Helium MFC set to  0.000000
3/6/2011	2:48:16 PM	H2 MFC set to  0.000000
3/6/2011	2:48:16 PM	BCl3 MFC set to  0.000000
3/6/2011	2:48:16 PM	PHl3 MFC set to  0.000000
3/6/2011	2:48:16 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:48:16 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:48:16 PM	Tube furnace set to 0
3/6/2011	2:48:47 PM	Helium valve closed
3/6/2011	2:48:47 PM	H2 valve closed
3/6/2011	2:48:47 PM	BCl3 valve closed
3/6/2011	2:48:47 PM	PH3 valve closed
3/6/2011	2:48:47 PM	SiCl4 pre valve closed
3/6/2011	2:48:47 PM	SiCl4 post valve closed
3/6/2011	2:48:47 PM	Bubbler valve closed
3/6/2011	2:48:47 PM	Main Vac valve opened
3/6/2011	2:48:47 PM	Bypass valve opened
3/6/2011	2:48:47 PM	Helium MFC set to  0.000000
3/6/2011	2:48:47 PM	H2 MFC set to  0.000000
3/6/2011	2:48:47 PM	BCl3 MFC set to  0.000000
3/6/2011	2:48:47 PM	PHl3 MFC set to  0.000000
3/6/2011	2:48:47 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:48:47 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:48:47 PM	Tube furnace set to 0
3/6/2011	2:48:47 PM	Run finished at 2:48 PM
3/6/2011	2:48:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	2:55:24 PM	Recipe started at 2:55 PM
3/6/2011	2:55:24 PM	Helium valve closed
3/6/2011	2:55:24 PM	H2 valve closed
3/6/2011	2:55:24 PM	BCl3 valve closed
3/6/2011	2:55:24 PM	PH3 valve closed
3/6/2011	2:55:24 PM	SiCl4 pre valve closed
3/6/2011	2:55:24 PM	SiCl4 post valve closed
3/6/2011	2:55:24 PM	Main Vac valve closed
3/6/2011	2:55:24 PM	Bubbler valve closed
3/6/2011	2:55:24 PM	Bypass valve opened
3/6/2011	2:55:24 PM	Helium MFC set to  0.000000
3/6/2011	2:55:24 PM	H2 MFC set to  0.000000
3/6/2011	2:55:24 PM	BCl3 MFC set to  0.000000
3/6/2011	2:55:24 PM	PHl3 MFC set to  0.000000
3/6/2011	2:55:24 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:55:24 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:55:24 PM	Tube furnace set to 100
3/6/2011	2:55:25 PM	Helium valve closed
3/6/2011	2:55:25 PM	H2 valve closed
3/6/2011	2:55:25 PM	BCl3 valve closed
3/6/2011	2:55:25 PM	PH3 valve closed
3/6/2011	2:55:25 PM	SiCl4 pre valve closed
3/6/2011	2:55:25 PM	SiCl4 post valve closed
3/6/2011	2:55:25 PM	Bubbler valve closed
3/6/2011	2:55:25 PM	Main Vac valve opened
3/6/2011	2:55:25 PM	Bypass valve opened
3/6/2011	2:55:25 PM	Helium MFC set to  0.000000
3/6/2011	2:55:25 PM	H2 MFC set to  0.000000
3/6/2011	2:55:25 PM	BCl3 MFC set to  0.000000
3/6/2011	2:55:25 PM	PHl3 MFC set to  0.000000
3/6/2011	2:55:25 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:55:25 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:55:25 PM	Tube furnace set to 100
3/6/2011	2:55:45 PM	H2 valve closed
3/6/2011	2:55:45 PM	BCl3 valve closed
3/6/2011	2:55:45 PM	PH3 valve closed
3/6/2011	2:55:45 PM	SiCl4 pre valve closed
3/6/2011	2:55:45 PM	SiCl4 post valve closed
3/6/2011	2:55:45 PM	Main Vac valve closed
3/6/2011	2:55:45 PM	Bypass valve closed
3/6/2011	2:55:45 PM	Bubbler valve closed
3/6/2011	2:55:45 PM	Helium valve opened
3/6/2011	2:55:45 PM	Helium MFC set to  400.000000
3/6/2011	2:55:45 PM	H2 MFC set to  0.000000
3/6/2011	2:55:45 PM	BCl3 MFC set to  0.000000
3/6/2011	2:55:45 PM	PHl3 MFC set to  0.000000
3/6/2011	2:55:45 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:55:45 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:55:45 PM	Tube furnace set to 100
3/6/2011	2:57:29 PM	H2 valve closed
3/6/2011	2:57:29 PM	BCl3 valve closed
3/6/2011	2:57:29 PM	PH3 valve closed
3/6/2011	2:57:29 PM	SiCl4 pre valve closed
3/6/2011	2:57:29 PM	SiCl4 post valve closed
3/6/2011	2:57:29 PM	Main Vac valve closed
3/6/2011	2:57:29 PM	Bypass valve closed
3/6/2011	2:57:29 PM	Helium valve opened
3/6/2011	2:57:29 PM	Bubbler valve opened
3/6/2011	2:57:29 PM	Helium MFC set to  400.000000
3/6/2011	2:57:29 PM	H2 MFC set to  0.000000
3/6/2011	2:57:29 PM	BCl3 MFC set to  0.000000
3/6/2011	2:57:29 PM	PHl3 MFC set to  0.000000
3/6/2011	2:57:29 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:57:29 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:57:29 PM	Tube furnace set to 100
3/6/2011	2:58:29 PM	Helium valve closed
3/6/2011	2:58:29 PM	H2 valve closed
3/6/2011	2:58:29 PM	BCl3 valve closed
3/6/2011	2:58:29 PM	PH3 valve closed
3/6/2011	2:58:29 PM	SiCl4 pre valve closed
3/6/2011	2:58:29 PM	SiCl4 post valve closed
3/6/2011	2:58:29 PM	Main Vac valve closed
3/6/2011	2:58:29 PM	Bypass valve closed
3/6/2011	2:58:29 PM	Bubbler valve closed
3/6/2011	2:58:29 PM	Helium MFC set to  0.000000
3/6/2011	2:58:29 PM	H2 MFC set to  0.000000
3/6/2011	2:58:29 PM	BCl3 MFC set to  0.000000
3/6/2011	2:58:29 PM	PHl3 MFC set to  0.000000
3/6/2011	2:58:29 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:58:29 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:58:29 PM	Tube furnace set to 100
3/6/2011	2:58:59 PM	Helium valve closed
3/6/2011	2:58:59 PM	H2 valve closed
3/6/2011	2:58:59 PM	BCl3 valve closed
3/6/2011	2:58:59 PM	PH3 valve closed
3/6/2011	2:58:59 PM	SiCl4 pre valve closed
3/6/2011	2:58:59 PM	SiCl4 post valve closed
3/6/2011	2:58:59 PM	Main Vac valve closed
3/6/2011	2:58:59 PM	Bubbler valve closed
3/6/2011	2:58:59 PM	Bypass valve opened
3/6/2011	2:58:59 PM	Helium MFC set to  0.000000
3/6/2011	2:58:59 PM	H2 MFC set to  0.000000
3/6/2011	2:58:59 PM	BCl3 MFC set to  0.000000
3/6/2011	2:58:59 PM	PHl3 MFC set to  0.000000
3/6/2011	2:58:59 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:58:59 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:58:59 PM	Tube furnace set to 100
3/6/2011	2:59:20 PM	Helium valve closed
3/6/2011	2:59:20 PM	H2 valve closed
3/6/2011	2:59:20 PM	BCl3 valve closed
3/6/2011	2:59:20 PM	PH3 valve closed
3/6/2011	2:59:20 PM	SiCl4 pre valve closed
3/6/2011	2:59:20 PM	SiCl4 post valve closed
3/6/2011	2:59:20 PM	Bubbler valve closed
3/6/2011	2:59:20 PM	Main Vac valve opened
3/6/2011	2:59:20 PM	Bypass valve opened
3/6/2011	2:59:20 PM	Helium MFC set to  0.000000
3/6/2011	2:59:20 PM	H2 MFC set to  0.000000
3/6/2011	2:59:20 PM	BCl3 MFC set to  0.000000
3/6/2011	2:59:20 PM	PHl3 MFC set to  0.000000
3/6/2011	2:59:20 PM	SiCl4 MFC set to  0.000000
3/6/2011	2:59:20 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	2:59:20 PM	Tube furnace set to 100
3/6/2011	2:59:21 PM	Run finished at 2:59 PM
3/6/2011	3:01:13 PM	Helium MFC set to  100.000000
3/6/2011	3:01:13 PM	Helium valve opened
3/6/2011	3:02:00 PM	Helium valve closed
3/6/2011	3:03:44 PM	Helium valve opened
3/6/2011	3:04:18 PM	Helium valve closed
3/6/2011	3:05:31 PM	Tube furnace set to 0
3/6/2011	3:05:32 PM	Helium valve opened
3/6/2011	3:07:49 PM	Helium valve closed
3/6/2011	3:08:45 PM	Helium valve opened
3/6/2011	3:09:00 PM	Helium MFC set to  0.000000
3/6/2011	3:09:01 PM	Helium valve closed
3/6/2011	3:10:10 PM	Helium MFC set to  50.000000
3/6/2011	3:10:10 PM	Helium valve opened
3/6/2011	3:10:17 PM	Main Vac valve closed
3/6/2011	3:10:18 PM	Bypass valve closed
3/6/2011	3:10:37 PM	Bypass valve opened
3/6/2011	3:10:38 PM	Main Vac valve opened
3/6/2011	3:11:05 PM	Helium valve closed
3/6/2011	3:11:07 PM	Helium MFC set to  0.000000
3/6/2011	3:21:01 PM	Helium MFC set to  100.000000
3/6/2011	3:21:01 PM	Helium valve opened
3/6/2011	3:21:56 PM	Helium valve closed
3/6/2011	3:26:52 PM	Helium valve opened
3/6/2011	3:27:56 PM	Helium valve closed
3/6/2011	3:27:58 PM	Helium MFC set to  0.000000
3/6/2011	3:31:01 PM	Helium MFC set to  100.000000
3/6/2011	3:31:02 PM	Helium valve opened
3/6/2011	3:32:01 PM	Helium valve closed
3/6/2011	3:32:03 PM	Helium MFC set to  0.000000
3/6/2011	3:32:51 PM	Main Vac valve closed
3/6/2011	3:32:53 PM	Bypass valve closed
3/6/2011	3:33:06 PM	Bypass valve opened
3/6/2011	3:33:06 PM	Main Vac valve opened
3/6/2011	3:33:10 PM	Helium MFC set to  100.000000
3/6/2011	3:33:12 PM	Helium valve opened
3/6/2011	3:33:26 PM	Helium valve closed
3/6/2011	3:33:28 PM	Helium MFC set to  0.000000
3/6/2011	3:34:13 PM	Recipe started at 3:34 PM
3/6/2011	3:34:13 PM	Helium valve closed
3/6/2011	3:34:13 PM	BCl3 valve closed
3/6/2011	3:34:13 PM	PH3 valve closed
3/6/2011	3:34:13 PM	SiCl4 pre valve closed
3/6/2011	3:34:13 PM	SiCl4 post valve closed
3/6/2011	3:34:13 PM	Main Vac valve closed
3/6/2011	3:34:13 PM	Bypass valve closed
3/6/2011	3:34:13 PM	Bubbler valve closed
3/6/2011	3:34:13 PM	H2 valve opened
3/6/2011	3:34:13 PM	Helium MFC set to  0.000000
3/6/2011	3:34:13 PM	H2 MFC set to  500.000000
3/6/2011	3:34:13 PM	BCl3 MFC set to  0.000000
3/6/2011	3:34:13 PM	PHl3 MFC set to  0.000000
3/6/2011	3:34:13 PM	SiCl4 MFC set to  0.000000
3/6/2011	3:34:13 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	3:34:13 PM	Tube furnace set to 200
3/6/2011	3:35:33 PM	Helium valve closed
3/6/2011	3:35:33 PM	BCl3 valve closed
3/6/2011	3:35:33 PM	PH3 valve closed
3/6/2011	3:35:33 PM	SiCl4 pre valve closed
3/6/2011	3:35:33 PM	SiCl4 post valve closed
3/6/2011	3:35:33 PM	Main Vac valve closed
3/6/2011	3:35:33 PM	Bypass valve closed
3/6/2011	3:35:33 PM	H2 valve opened
3/6/2011	3:35:33 PM	Bubbler valve opened
3/6/2011	3:35:33 PM	Helium MFC set to  0.000000
3/6/2011	3:35:33 PM	H2 MFC set to  400.000000
3/6/2011	3:35:33 PM	BCl3 MFC set to  0.000000
3/6/2011	3:35:33 PM	PHl3 MFC set to  0.000000
3/6/2011	3:35:33 PM	SiCl4 MFC set to  0.000000
3/6/2011	3:35:33 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	3:35:33 PM	Tube furnace set to 1002
3/6/2011	3:52:13 PM	Helium valve closed
3/6/2011	3:52:13 PM	BCl3 valve closed
3/6/2011	3:52:13 PM	PH3 valve closed
3/6/2011	3:52:13 PM	SiCl4 pre valve closed
3/6/2011	3:52:13 PM	SiCl4 post valve closed
3/6/2011	3:52:13 PM	Main Vac valve closed
3/6/2011	3:52:13 PM	Bypass valve closed
3/6/2011	3:52:13 PM	H2 valve opened
3/6/2011	3:52:13 PM	Bubbler valve opened
3/6/2011	3:52:13 PM	Helium MFC set to  0.000000
3/6/2011	3:52:13 PM	H2 MFC set to  400.000000
3/6/2011	3:52:13 PM	BCl3 MFC set to  0.000000
3/6/2011	3:52:13 PM	PHl3 MFC set to  0.000000
3/6/2011	3:52:13 PM	SiCl4 MFC set to  0.000000
3/6/2011	3:52:13 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	3:52:13 PM	Tube furnace set to 1000
3/6/2011	3:59:42 PM	Helium valve closed
3/6/2011	3:59:42 PM	PH3 valve closed
3/6/2011	3:59:42 PM	Main Vac valve closed
3/6/2011	3:59:42 PM	Bypass valve closed
3/6/2011	3:59:42 PM	H2 valve opened
3/6/2011	3:59:42 PM	BCl3 valve opened
3/6/2011	3:59:42 PM	SiCl4 pre valve opened
3/6/2011	3:59:42 PM	SiCl4 post valve opened
3/6/2011	3:59:42 PM	Bubbler valve opened
3/6/2011	3:59:42 PM	Helium MFC set to  0.000000
3/6/2011	3:59:42 PM	H2 MFC set to  50.000000
3/6/2011	3:59:42 PM	BCl3 MFC set to  2.000000
3/6/2011	3:59:42 PM	PHl3 MFC set to  0.000000
3/6/2011	3:59:42 PM	SiCl4 MFC set to  50.000000
3/6/2011	3:59:42 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	3:59:42 PM	Tube furnace set to 1000
3/6/2011	4:01:30 PM	Helium valve closed
3/6/2011	4:01:30 PM	BCl3 valve closed
3/6/2011	4:01:30 PM	PH3 valve closed
3/6/2011	4:01:30 PM	SiCl4 pre valve closed
3/6/2011	4:01:30 PM	SiCl4 post valve closed
3/6/2011	4:01:30 PM	Main Vac valve closed
3/6/2011	4:01:30 PM	Bypass valve closed
3/6/2011	4:01:30 PM	H2 valve opened
3/6/2011	4:01:30 PM	Bubbler valve opened
3/6/2011	4:01:30 PM	Helium MFC set to  0.000000
3/6/2011	4:01:30 PM	H2 MFC set to  500.000000
3/6/2011	4:01:30 PM	BCl3 MFC set to  0.000000
3/6/2011	4:01:30 PM	PHl3 MFC set to  0.000000
3/6/2011	4:01:30 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:01:30 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:01:30 PM	Tube furnace set to 0
3/6/2011	4:01:34 PM	H2 valve closed
3/6/2011	4:01:34 PM	BCl3 valve closed
3/6/2011	4:01:34 PM	PH3 valve closed
3/6/2011	4:01:34 PM	SiCl4 pre valve closed
3/6/2011	4:01:34 PM	SiCl4 post valve closed
3/6/2011	4:01:34 PM	Main Vac valve closed
3/6/2011	4:01:34 PM	Bypass valve closed
3/6/2011	4:01:34 PM	Helium valve opened
3/6/2011	4:01:34 PM	Bubbler valve opened
3/6/2011	4:01:34 PM	Helium MFC set to  400.000000
3/6/2011	4:01:34 PM	H2 MFC set to  0.000000
3/6/2011	4:01:34 PM	BCl3 MFC set to  0.000000
3/6/2011	4:01:34 PM	PHl3 MFC set to  0.000000
3/6/2011	4:01:34 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:01:34 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:01:34 PM	Tube furnace set to 0
3/6/2011	4:01:38 PM	Helium valve closed
3/6/2011	4:01:38 PM	H2 valve closed
3/6/2011	4:01:38 PM	BCl3 valve closed
3/6/2011	4:01:38 PM	PH3 valve closed
3/6/2011	4:01:38 PM	SiCl4 pre valve closed
3/6/2011	4:01:38 PM	SiCl4 post valve closed
3/6/2011	4:01:38 PM	Main Vac valve closed
3/6/2011	4:01:38 PM	Bypass valve closed
3/6/2011	4:01:38 PM	Bubbler valve closed
3/6/2011	4:01:38 PM	Helium MFC set to  0.000000
3/6/2011	4:01:38 PM	H2 MFC set to  0.000000
3/6/2011	4:01:38 PM	BCl3 MFC set to  0.000000
3/6/2011	4:01:38 PM	PHl3 MFC set to  0.000000
3/6/2011	4:01:38 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:01:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:01:38 PM	Tube furnace set to 0
3/6/2011	4:01:38 PM	Run finished at 4:01 PM
3/6/2011	4:02:09 PM	Helium MFC set to  100.000000
3/6/2011	4:02:12 PM	Helium valve opened
3/6/2011	4:02:18 PM	Bubbler valve opened
3/6/2011	4:02:22 PM	Helium MFC set to  400.000000
3/6/2011	4:04:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/6/2011	4:04:52 PM	Recipe started at 4:04 PM
3/6/2011	4:04:52 PM	Helium valve closed
3/6/2011	4:04:52 PM	H2 valve closed
3/6/2011	4:04:52 PM	BCl3 valve closed
3/6/2011	4:04:52 PM	PH3 valve closed
3/6/2011	4:04:52 PM	SiCl4 pre valve closed
3/6/2011	4:04:52 PM	SiCl4 post valve closed
3/6/2011	4:04:52 PM	Main Vac valve closed
3/6/2011	4:04:52 PM	Bypass valve closed
3/6/2011	4:04:52 PM	Bubbler valve closed
3/6/2011	4:04:52 PM	Helium MFC set to  0.000000
3/6/2011	4:04:52 PM	H2 MFC set to  0.000000
3/6/2011	4:04:52 PM	BCl3 MFC set to  0.000000
3/6/2011	4:04:52 PM	PHl3 MFC set to  0.000000
3/6/2011	4:04:52 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:04:52 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:04:52 PM	Tube furnace set to 0
3/6/2011	4:04:52 PM	Run finished at 4:04 PM
3/6/2011	4:04:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/6/2011	4:04:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	4:04:57 PM	Recipe started at 4:04 PM
3/6/2011	4:04:57 PM	Helium valve closed
3/6/2011	4:04:57 PM	H2 valve closed
3/6/2011	4:04:57 PM	BCl3 valve closed
3/6/2011	4:04:57 PM	PH3 valve closed
3/6/2011	4:04:57 PM	SiCl4 pre valve closed
3/6/2011	4:04:57 PM	SiCl4 post valve closed
3/6/2011	4:04:57 PM	Main Vac valve closed
3/6/2011	4:04:57 PM	Bubbler valve closed
3/6/2011	4:04:57 PM	Bypass valve opened
3/6/2011	4:04:57 PM	Helium MFC set to  0.000000
3/6/2011	4:04:57 PM	H2 MFC set to  0.000000
3/6/2011	4:04:57 PM	BCl3 MFC set to  0.000000
3/6/2011	4:04:57 PM	PHl3 MFC set to  0.000000
3/6/2011	4:04:57 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:04:57 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:04:57 PM	Tube furnace set to 0
3/6/2011	4:05:07 PM	Run aborted at 4:05 PM
3/6/2011	4:05:07 PM	Helium valve closed
3/6/2011	4:05:07 PM	H2 valve closed
3/6/2011	4:05:07 PM	BCl3 valve closed
3/6/2011	4:05:07 PM	PH3 valve closed
3/6/2011	4:05:07 PM	SiCl4 pre valve closed
3/6/2011	4:05:07 PM	SiCl4 post valve closed
3/6/2011	4:05:07 PM	Bypass valve closed
3/6/2011	4:05:07 PM	Main Vac valve closed
3/6/2011	4:05:07 PM	Bubbler valve closed
3/6/2011	4:05:07 PM	Helium MFC set to  0.000000
3/6/2011	4:05:07 PM	H2 MFC set to  0.000000
3/6/2011	4:05:07 PM	BCl3 MFC set to  0.000000
3/6/2011	4:05:07 PM	PHl3 MFC set to  0.000000
3/6/2011	4:05:07 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:05:07 PM	Tube furnace set to 0
3/6/2011	4:05:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	4:05:26 PM	Recipe started at 4:05 PM
3/6/2011	4:05:26 PM	Helium valve closed
3/6/2011	4:05:26 PM	BCl3 valve closed
3/6/2011	4:05:26 PM	PH3 valve closed
3/6/2011	4:05:26 PM	SiCl4 pre valve closed
3/6/2011	4:05:26 PM	SiCl4 post valve closed
3/6/2011	4:05:26 PM	Main Vac valve closed
3/6/2011	4:05:26 PM	Bypass valve closed
3/6/2011	4:05:26 PM	Bubbler valve closed
3/6/2011	4:05:26 PM	H2 valve opened
3/6/2011	4:05:26 PM	Helium MFC set to  0.000000
3/6/2011	4:05:26 PM	H2 MFC set to  500.000000
3/6/2011	4:05:26 PM	BCl3 MFC set to  0.000000
3/6/2011	4:05:26 PM	PHl3 MFC set to  0.000000
3/6/2011	4:05:26 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:05:26 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:05:27 PM	Tube furnace set to 200
3/6/2011	4:05:30 PM	Run aborted at 4:05 PM
3/6/2011	4:05:30 PM	Helium valve closed
3/6/2011	4:05:30 PM	H2 valve closed
3/6/2011	4:05:30 PM	BCl3 valve closed
3/6/2011	4:05:30 PM	PH3 valve closed
3/6/2011	4:05:30 PM	SiCl4 pre valve closed
3/6/2011	4:05:30 PM	SiCl4 post valve closed
3/6/2011	4:05:30 PM	Bypass valve closed
3/6/2011	4:05:30 PM	Main Vac valve closed
3/6/2011	4:05:30 PM	Bubbler valve closed
3/6/2011	4:05:30 PM	Helium MFC set to  0.000000
3/6/2011	4:05:30 PM	H2 MFC set to  0.000000
3/6/2011	4:05:30 PM	BCl3 MFC set to  0.000000
3/6/2011	4:05:30 PM	PHl3 MFC set to  0.000000
3/6/2011	4:05:30 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:05:30 PM	Tube furnace set to 0
3/6/2011	4:05:42 PM	Recipe started at 4:05 PM
3/6/2011	4:05:42 PM	Helium valve closed
3/6/2011	4:05:42 PM	BCl3 valve closed
3/6/2011	4:05:42 PM	PH3 valve closed
3/6/2011	4:05:42 PM	SiCl4 pre valve closed
3/6/2011	4:05:42 PM	SiCl4 post valve closed
3/6/2011	4:05:42 PM	Main Vac valve closed
3/6/2011	4:05:42 PM	Bypass valve closed
3/6/2011	4:05:42 PM	Bubbler valve closed
3/6/2011	4:05:42 PM	H2 valve opened
3/6/2011	4:05:42 PM	Helium MFC set to  0.000000
3/6/2011	4:05:42 PM	H2 MFC set to  500.000000
3/6/2011	4:05:42 PM	BCl3 MFC set to  0.000000
3/6/2011	4:05:42 PM	PHl3 MFC set to  0.000000
3/6/2011	4:05:42 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:05:42 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:05:42 PM	Tube furnace set to 200
3/6/2011	4:06:36 PM	Helium valve closed
3/6/2011	4:06:36 PM	BCl3 valve closed
3/6/2011	4:06:36 PM	PH3 valve closed
3/6/2011	4:06:36 PM	SiCl4 pre valve closed
3/6/2011	4:06:36 PM	SiCl4 post valve closed
3/6/2011	4:06:36 PM	Main Vac valve closed
3/6/2011	4:06:36 PM	Bypass valve closed
3/6/2011	4:06:36 PM	H2 valve opened
3/6/2011	4:06:36 PM	Bubbler valve opened
3/6/2011	4:06:36 PM	Helium MFC set to  0.000000
3/6/2011	4:06:36 PM	H2 MFC set to  400.000000
3/6/2011	4:06:36 PM	BCl3 MFC set to  0.000000
3/6/2011	4:06:36 PM	PHl3 MFC set to  0.000000
3/6/2011	4:06:36 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:06:36 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:06:36 PM	Tube furnace set to 1002
3/6/2011	4:13:45 PM	Helium valve closed
3/6/2011	4:13:45 PM	BCl3 valve closed
3/6/2011	4:13:45 PM	PH3 valve closed
3/6/2011	4:13:45 PM	SiCl4 pre valve closed
3/6/2011	4:13:45 PM	SiCl4 post valve closed
3/6/2011	4:13:45 PM	Main Vac valve closed
3/6/2011	4:13:45 PM	Bypass valve closed
3/6/2011	4:13:45 PM	H2 valve opened
3/6/2011	4:13:45 PM	Bubbler valve opened
3/6/2011	4:13:45 PM	Helium MFC set to  0.000000
3/6/2011	4:13:45 PM	H2 MFC set to  400.000000
3/6/2011	4:13:45 PM	BCl3 MFC set to  0.000000
3/6/2011	4:13:45 PM	PHl3 MFC set to  0.000000
3/6/2011	4:13:45 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:13:45 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:13:45 PM	Tube furnace set to 1000
3/6/2011	4:18:05 PM	Helium valve closed
3/6/2011	4:18:05 PM	PH3 valve closed
3/6/2011	4:18:05 PM	Main Vac valve closed
3/6/2011	4:18:05 PM	Bypass valve closed
3/6/2011	4:18:05 PM	H2 valve opened
3/6/2011	4:18:05 PM	BCl3 valve opened
3/6/2011	4:18:05 PM	SiCl4 pre valve opened
3/6/2011	4:18:05 PM	SiCl4 post valve opened
3/6/2011	4:18:05 PM	Bubbler valve opened
3/6/2011	4:18:05 PM	Helium MFC set to  0.000000
3/6/2011	4:18:05 PM	H2 MFC set to  500.000000
3/6/2011	4:18:05 PM	BCl3 MFC set to  2.000000
3/6/2011	4:18:05 PM	PHl3 MFC set to  0.000000
3/6/2011	4:18:05 PM	SiCl4 MFC set to  50.000000
3/6/2011	4:18:05 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:18:05 PM	Tube furnace set to 1000
3/6/2011	4:23:05 PM	Helium valve closed
3/6/2011	4:23:05 PM	BCl3 valve closed
3/6/2011	4:23:05 PM	PH3 valve closed
3/6/2011	4:23:05 PM	SiCl4 pre valve closed
3/6/2011	4:23:05 PM	SiCl4 post valve closed
3/6/2011	4:23:05 PM	Main Vac valve closed
3/6/2011	4:23:05 PM	Bypass valve closed
3/6/2011	4:23:05 PM	H2 valve opened
3/6/2011	4:23:05 PM	Bubbler valve opened
3/6/2011	4:23:05 PM	Helium MFC set to  0.000000
3/6/2011	4:23:05 PM	H2 MFC set to  500.000000
3/6/2011	4:23:05 PM	BCl3 MFC set to  0.000000
3/6/2011	4:23:05 PM	PHl3 MFC set to  0.000000
3/6/2011	4:23:05 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:23:05 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:23:05 PM	Tube furnace set to 0
3/6/2011	4:25:55 PM	H2 valve closed
3/6/2011	4:25:55 PM	BCl3 valve closed
3/6/2011	4:25:55 PM	PH3 valve closed
3/6/2011	4:25:55 PM	SiCl4 pre valve closed
3/6/2011	4:25:55 PM	SiCl4 post valve closed
3/6/2011	4:25:55 PM	Main Vac valve closed
3/6/2011	4:25:55 PM	Bypass valve closed
3/6/2011	4:25:55 PM	Helium valve opened
3/6/2011	4:25:55 PM	Bubbler valve opened
3/6/2011	4:25:56 PM	Helium MFC set to  400.000000
3/6/2011	4:25:56 PM	H2 MFC set to  0.000000
3/6/2011	4:25:56 PM	BCl3 MFC set to  0.000000
3/6/2011	4:25:56 PM	PHl3 MFC set to  0.000000
3/6/2011	4:25:56 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:25:56 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:25:56 PM	Tube furnace set to 0
3/6/2011	4:45:56 PM	Helium valve closed
3/6/2011	4:45:56 PM	H2 valve closed
3/6/2011	4:45:56 PM	BCl3 valve closed
3/6/2011	4:45:56 PM	PH3 valve closed
3/6/2011	4:45:56 PM	SiCl4 pre valve closed
3/6/2011	4:45:56 PM	SiCl4 post valve closed
3/6/2011	4:45:56 PM	Main Vac valve closed
3/6/2011	4:45:56 PM	Bypass valve closed
3/6/2011	4:45:56 PM	Bubbler valve closed
3/6/2011	4:45:56 PM	Helium MFC set to  0.000000
3/6/2011	4:45:56 PM	H2 MFC set to  0.000000
3/6/2011	4:45:56 PM	BCl3 MFC set to  0.000000
3/6/2011	4:45:56 PM	PHl3 MFC set to  0.000000
3/6/2011	4:45:56 PM	SiCl4 MFC set to  0.000000
3/6/2011	4:45:56 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	4:45:56 PM	Tube furnace set to 0
3/6/2011	4:45:56 PM	Run finished at 4:45 PM
3/6/2011	5:01:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2011	5:01:54 PM	Recipe started at 5:01 PM
3/6/2011	5:01:54 PM	H2 valve closed
3/6/2011	5:01:54 PM	BCl3 valve closed
3/6/2011	5:01:54 PM	PH3 valve closed
3/6/2011	5:01:54 PM	SiCl4 pre valve closed
3/6/2011	5:01:54 PM	SiCl4 post valve closed
3/6/2011	5:01:54 PM	Main Vac valve closed
3/6/2011	5:01:54 PM	Bypass valve closed
3/6/2011	5:01:54 PM	Bubbler valve closed
3/6/2011	5:01:54 PM	Helium valve opened
3/6/2011	5:01:54 PM	Helium MFC set to  500.000000
3/6/2011	5:01:54 PM	H2 MFC set to  0.000000
3/6/2011	5:01:54 PM	BCl3 MFC set to  0.000000
3/6/2011	5:01:54 PM	PHl3 MFC set to  0.000000
3/6/2011	5:01:54 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:01:54 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:01:55 PM	Tube furnace set to 0
3/6/2011	5:01:59 PM	Helium valve closed
3/6/2011	5:01:59 PM	H2 valve closed
3/6/2011	5:01:59 PM	BCl3 valve closed
3/6/2011	5:01:59 PM	PH3 valve closed
3/6/2011	5:01:59 PM	SiCl4 pre valve closed
3/6/2011	5:01:59 PM	SiCl4 post valve closed
3/6/2011	5:01:59 PM	Main Vac valve closed
3/6/2011	5:01:59 PM	Bypass valve closed
3/6/2011	5:01:59 PM	Bubbler valve closed
3/6/2011	5:01:59 PM	Helium MFC set to  0.000000
3/6/2011	5:01:59 PM	H2 MFC set to  0.000000
3/6/2011	5:01:59 PM	BCl3 MFC set to  0.000000
3/6/2011	5:01:59 PM	PHl3 MFC set to  0.000000
3/6/2011	5:01:59 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:01:59 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:01:59 PM	Tube furnace set to 0
3/6/2011	5:02:00 PM	Run finished at 5:02 PM
3/6/2011	5:02:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2011	5:05:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/6/2011	5:05:35 PM	Recipe started at 5:05 PM
3/6/2011	5:05:35 PM	Helium valve closed
3/6/2011	5:05:35 PM	H2 valve closed
3/6/2011	5:05:35 PM	BCl3 valve closed
3/6/2011	5:05:35 PM	PH3 valve closed
3/6/2011	5:05:35 PM	SiCl4 pre valve closed
3/6/2011	5:05:35 PM	SiCl4 post valve closed
3/6/2011	5:05:35 PM	Main Vac valve closed
3/6/2011	5:05:35 PM	Bubbler valve closed
3/6/2011	5:05:35 PM	Bypass valve opened
3/6/2011	5:05:35 PM	Helium MFC set to  0.000000
3/6/2011	5:05:35 PM	H2 MFC set to  0.000000
3/6/2011	5:05:35 PM	BCl3 MFC set to  0.000000
3/6/2011	5:05:35 PM	PHl3 MFC set to  0.000000
3/6/2011	5:05:35 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:05:35 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:05:35 PM	Tube furnace set to 0
3/6/2011	5:06:06 PM	Helium valve closed
3/6/2011	5:06:06 PM	H2 valve closed
3/6/2011	5:06:06 PM	BCl3 valve closed
3/6/2011	5:06:06 PM	PH3 valve closed
3/6/2011	5:06:06 PM	SiCl4 pre valve closed
3/6/2011	5:06:06 PM	SiCl4 post valve closed
3/6/2011	5:06:06 PM	Bubbler valve closed
3/6/2011	5:06:06 PM	Main Vac valve opened
3/6/2011	5:06:06 PM	Bypass valve opened
3/6/2011	5:06:06 PM	Helium MFC set to  0.000000
3/6/2011	5:06:06 PM	H2 MFC set to  0.000000
3/6/2011	5:06:06 PM	BCl3 MFC set to  0.000000
3/6/2011	5:06:06 PM	PHl3 MFC set to  0.000000
3/6/2011	5:06:06 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:06:06 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:06:07 PM	Tube furnace set to 0
3/6/2011	5:07:07 PM	H2 valve closed
3/6/2011	5:07:07 PM	BCl3 valve closed
3/6/2011	5:07:07 PM	PH3 valve closed
3/6/2011	5:07:07 PM	SiCl4 pre valve closed
3/6/2011	5:07:07 PM	SiCl4 post valve closed
3/6/2011	5:07:07 PM	Bubbler valve closed
3/6/2011	5:07:07 PM	Helium valve opened
3/6/2011	5:07:07 PM	Main Vac valve opened
3/6/2011	5:07:07 PM	Bypass valve opened
3/6/2011	5:07:07 PM	Helium MFC set to  100.000000
3/6/2011	5:07:07 PM	H2 MFC set to  0.000000
3/6/2011	5:07:07 PM	BCl3 MFC set to  0.000000
3/6/2011	5:07:07 PM	PHl3 MFC set to  0.000000
3/6/2011	5:07:07 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:07:07 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:07:07 PM	Tube furnace set to 0
3/6/2011	5:08:07 PM	Helium valve closed
3/6/2011	5:08:07 PM	H2 valve closed
3/6/2011	5:08:07 PM	BCl3 valve closed
3/6/2011	5:08:07 PM	PH3 valve closed
3/6/2011	5:08:07 PM	SiCl4 pre valve closed
3/6/2011	5:08:07 PM	SiCl4 post valve closed
3/6/2011	5:08:07 PM	Bubbler valve closed
3/6/2011	5:08:07 PM	Main Vac valve opened
3/6/2011	5:08:07 PM	Bypass valve opened
3/6/2011	5:08:07 PM	Helium MFC set to  0.000000
3/6/2011	5:08:07 PM	H2 MFC set to  0.000000
3/6/2011	5:08:07 PM	BCl3 MFC set to  0.000000
3/6/2011	5:08:07 PM	PHl3 MFC set to  0.000000
3/6/2011	5:08:07 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:08:07 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:08:07 PM	Tube furnace set to 0
3/6/2011	5:09:07 PM	H2 valve closed
3/6/2011	5:09:07 PM	BCl3 valve closed
3/6/2011	5:09:07 PM	PH3 valve closed
3/6/2011	5:09:07 PM	SiCl4 pre valve closed
3/6/2011	5:09:07 PM	SiCl4 post valve closed
3/6/2011	5:09:07 PM	Bubbler valve closed
3/6/2011	5:09:07 PM	Helium valve opened
3/6/2011	5:09:07 PM	Main Vac valve opened
3/6/2011	5:09:07 PM	Bypass valve opened
3/6/2011	5:09:07 PM	Helium MFC set to  100.000000
3/6/2011	5:09:07 PM	H2 MFC set to  0.000000
3/6/2011	5:09:07 PM	BCl3 MFC set to  0.000000
3/6/2011	5:09:07 PM	PHl3 MFC set to  0.000000
3/6/2011	5:09:07 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:09:07 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:09:07 PM	Tube furnace set to 0
3/6/2011	5:10:07 PM	Helium valve closed
3/6/2011	5:10:07 PM	H2 valve closed
3/6/2011	5:10:07 PM	BCl3 valve closed
3/6/2011	5:10:07 PM	PH3 valve closed
3/6/2011	5:10:07 PM	SiCl4 pre valve closed
3/6/2011	5:10:07 PM	SiCl4 post valve closed
3/6/2011	5:10:07 PM	Bubbler valve closed
3/6/2011	5:10:07 PM	Main Vac valve opened
3/6/2011	5:10:07 PM	Bypass valve opened
3/6/2011	5:10:07 PM	Helium MFC set to  0.000000
3/6/2011	5:10:07 PM	H2 MFC set to  0.000000
3/6/2011	5:10:07 PM	BCl3 MFC set to  0.000000
3/6/2011	5:10:07 PM	PHl3 MFC set to  0.000000
3/6/2011	5:10:07 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:10:07 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:10:07 PM	Tube furnace set to 0
3/6/2011	5:11:07 PM	H2 valve closed
3/6/2011	5:11:07 PM	BCl3 valve closed
3/6/2011	5:11:07 PM	PH3 valve closed
3/6/2011	5:11:07 PM	SiCl4 pre valve closed
3/6/2011	5:11:07 PM	SiCl4 post valve closed
3/6/2011	5:11:07 PM	Bubbler valve closed
3/6/2011	5:11:07 PM	Helium valve opened
3/6/2011	5:11:07 PM	Main Vac valve opened
3/6/2011	5:11:07 PM	Bypass valve opened
3/6/2011	5:11:07 PM	Helium MFC set to  100.000000
3/6/2011	5:11:07 PM	H2 MFC set to  0.000000
3/6/2011	5:11:07 PM	BCl3 MFC set to  0.000000
3/6/2011	5:11:07 PM	PHl3 MFC set to  0.000000
3/6/2011	5:11:07 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:11:07 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:11:08 PM	Tube furnace set to 0
3/6/2011	5:12:08 PM	Helium valve closed
3/6/2011	5:12:08 PM	H2 valve closed
3/6/2011	5:12:08 PM	BCl3 valve closed
3/6/2011	5:12:08 PM	PH3 valve closed
3/6/2011	5:12:08 PM	SiCl4 pre valve closed
3/6/2011	5:12:08 PM	SiCl4 post valve closed
3/6/2011	5:12:08 PM	Bubbler valve closed
3/6/2011	5:12:08 PM	Main Vac valve opened
3/6/2011	5:12:08 PM	Bypass valve opened
3/6/2011	5:12:08 PM	Helium MFC set to  0.000000
3/6/2011	5:12:08 PM	H2 MFC set to  0.000000
3/6/2011	5:12:08 PM	BCl3 MFC set to  0.000000
3/6/2011	5:12:08 PM	PHl3 MFC set to  0.000000
3/6/2011	5:12:08 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:12:08 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:12:08 PM	Tube furnace set to 0
3/6/2011	5:13:08 PM	H2 valve closed
3/6/2011	5:13:08 PM	BCl3 valve closed
3/6/2011	5:13:08 PM	PH3 valve closed
3/6/2011	5:13:08 PM	SiCl4 pre valve closed
3/6/2011	5:13:08 PM	SiCl4 post valve closed
3/6/2011	5:13:08 PM	Bubbler valve closed
3/6/2011	5:13:08 PM	Helium valve opened
3/6/2011	5:13:08 PM	Main Vac valve opened
3/6/2011	5:13:08 PM	Bypass valve opened
3/6/2011	5:13:08 PM	Helium MFC set to  100.000000
3/6/2011	5:13:08 PM	H2 MFC set to  0.000000
3/6/2011	5:13:08 PM	BCl3 MFC set to  0.000000
3/6/2011	5:13:08 PM	PHl3 MFC set to  0.000000
3/6/2011	5:13:08 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:13:08 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:13:08 PM	Tube furnace set to 0
3/6/2011	5:14:08 PM	Helium valve closed
3/6/2011	5:14:08 PM	H2 valve closed
3/6/2011	5:14:08 PM	BCl3 valve closed
3/6/2011	5:14:08 PM	PH3 valve closed
3/6/2011	5:14:08 PM	SiCl4 pre valve closed
3/6/2011	5:14:08 PM	SiCl4 post valve closed
3/6/2011	5:14:08 PM	Bubbler valve closed
3/6/2011	5:14:08 PM	Main Vac valve opened
3/6/2011	5:14:08 PM	Bypass valve opened
3/6/2011	5:14:08 PM	Helium MFC set to  0.000000
3/6/2011	5:14:08 PM	H2 MFC set to  0.000000
3/6/2011	5:14:08 PM	BCl3 MFC set to  0.000000
3/6/2011	5:14:08 PM	PHl3 MFC set to  0.000000
3/6/2011	5:14:08 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:14:08 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:14:08 PM	Tube furnace set to 0
3/6/2011	5:15:08 PM	H2 valve closed
3/6/2011	5:15:08 PM	BCl3 valve closed
3/6/2011	5:15:08 PM	PH3 valve closed
3/6/2011	5:15:08 PM	SiCl4 pre valve closed
3/6/2011	5:15:08 PM	SiCl4 post valve closed
3/6/2011	5:15:08 PM	Bubbler valve closed
3/6/2011	5:15:08 PM	Helium valve opened
3/6/2011	5:15:08 PM	Main Vac valve opened
3/6/2011	5:15:08 PM	Bypass valve opened
3/6/2011	5:15:08 PM	Helium MFC set to  100.000000
3/6/2011	5:15:08 PM	H2 MFC set to  0.000000
3/6/2011	5:15:08 PM	BCl3 MFC set to  0.000000
3/6/2011	5:15:08 PM	PHl3 MFC set to  0.000000
3/6/2011	5:15:08 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:15:08 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:15:08 PM	Tube furnace set to 0
3/6/2011	5:15:41 PM	Helium valve closed
3/6/2011	5:15:41 PM	H2 valve closed
3/6/2011	5:15:41 PM	BCl3 valve closed
3/6/2011	5:15:41 PM	PH3 valve closed
3/6/2011	5:15:41 PM	SiCl4 pre valve closed
3/6/2011	5:15:41 PM	SiCl4 post valve closed
3/6/2011	5:15:41 PM	Bubbler valve closed
3/6/2011	5:15:41 PM	Main Vac valve opened
3/6/2011	5:15:41 PM	Bypass valve opened
3/6/2011	5:15:41 PM	Helium MFC set to  0.000000
3/6/2011	5:15:41 PM	H2 MFC set to  0.000000
3/6/2011	5:15:41 PM	BCl3 MFC set to  0.000000
3/6/2011	5:15:41 PM	PHl3 MFC set to  0.000000
3/6/2011	5:15:41 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:15:41 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:15:42 PM	Tube furnace set to 0
3/6/2011	5:16:42 PM	H2 valve closed
3/6/2011	5:16:42 PM	BCl3 valve closed
3/6/2011	5:16:42 PM	PH3 valve closed
3/6/2011	5:16:42 PM	SiCl4 pre valve closed
3/6/2011	5:16:42 PM	SiCl4 post valve closed
3/6/2011	5:16:42 PM	Bubbler valve closed
3/6/2011	5:16:42 PM	Helium valve opened
3/6/2011	5:16:42 PM	Main Vac valve opened
3/6/2011	5:16:42 PM	Bypass valve opened
3/6/2011	5:16:42 PM	Helium MFC set to  100.000000
3/6/2011	5:16:42 PM	H2 MFC set to  0.000000
3/6/2011	5:16:42 PM	BCl3 MFC set to  0.000000
3/6/2011	5:16:42 PM	PHl3 MFC set to  0.000000
3/6/2011	5:16:42 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:16:42 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:16:42 PM	Tube furnace set to 0
3/6/2011	5:16:59 PM	Helium valve closed
3/6/2011	5:16:59 PM	H2 valve closed
3/6/2011	5:16:59 PM	BCl3 valve closed
3/6/2011	5:16:59 PM	PH3 valve closed
3/6/2011	5:16:59 PM	SiCl4 pre valve closed
3/6/2011	5:16:59 PM	SiCl4 post valve closed
3/6/2011	5:16:59 PM	Bubbler valve closed
3/6/2011	5:16:59 PM	Main Vac valve opened
3/6/2011	5:16:59 PM	Bypass valve opened
3/6/2011	5:16:59 PM	Helium MFC set to  0.000000
3/6/2011	5:16:59 PM	H2 MFC set to  0.000000
3/6/2011	5:16:59 PM	BCl3 MFC set to  0.000000
3/6/2011	5:16:59 PM	PHl3 MFC set to  0.000000
3/6/2011	5:16:59 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:16:59 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:16:59 PM	Tube furnace set to 0
3/6/2011	5:17:59 PM	H2 valve closed
3/6/2011	5:17:59 PM	BCl3 valve closed
3/6/2011	5:17:59 PM	PH3 valve closed
3/6/2011	5:17:59 PM	SiCl4 pre valve closed
3/6/2011	5:17:59 PM	SiCl4 post valve closed
3/6/2011	5:17:59 PM	Bubbler valve closed
3/6/2011	5:17:59 PM	Helium valve opened
3/6/2011	5:17:59 PM	Main Vac valve opened
3/6/2011	5:17:59 PM	Bypass valve opened
3/6/2011	5:17:59 PM	Helium MFC set to  100.000000
3/6/2011	5:17:59 PM	H2 MFC set to  0.000000
3/6/2011	5:17:59 PM	BCl3 MFC set to  0.000000
3/6/2011	5:17:59 PM	PHl3 MFC set to  0.000000
3/6/2011	5:17:59 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:17:59 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:17:59 PM	Tube furnace set to 0
3/6/2011	5:18:59 PM	Helium valve closed
3/6/2011	5:18:59 PM	H2 valve closed
3/6/2011	5:18:59 PM	BCl3 valve closed
3/6/2011	5:18:59 PM	PH3 valve closed
3/6/2011	5:18:59 PM	SiCl4 pre valve closed
3/6/2011	5:18:59 PM	SiCl4 post valve closed
3/6/2011	5:18:59 PM	Bubbler valve closed
3/6/2011	5:18:59 PM	Main Vac valve opened
3/6/2011	5:18:59 PM	Bypass valve opened
3/6/2011	5:18:59 PM	Helium MFC set to  0.000000
3/6/2011	5:18:59 PM	H2 MFC set to  0.000000
3/6/2011	5:18:59 PM	BCl3 MFC set to  0.000000
3/6/2011	5:18:59 PM	PHl3 MFC set to  0.000000
3/6/2011	5:18:59 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:18:59 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:19:00 PM	Tube furnace set to 0
3/6/2011	5:20:00 PM	H2 valve closed
3/6/2011	5:20:00 PM	BCl3 valve closed
3/6/2011	5:20:00 PM	PH3 valve closed
3/6/2011	5:20:00 PM	SiCl4 pre valve closed
3/6/2011	5:20:00 PM	SiCl4 post valve closed
3/6/2011	5:20:00 PM	Bubbler valve closed
3/6/2011	5:20:00 PM	Helium valve opened
3/6/2011	5:20:00 PM	Main Vac valve opened
3/6/2011	5:20:00 PM	Bypass valve opened
3/6/2011	5:20:00 PM	Helium MFC set to  100.000000
3/6/2011	5:20:00 PM	H2 MFC set to  0.000000
3/6/2011	5:20:00 PM	BCl3 MFC set to  0.000000
3/6/2011	5:20:00 PM	PHl3 MFC set to  0.000000
3/6/2011	5:20:00 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:20:00 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:20:00 PM	Tube furnace set to 0
3/6/2011	5:20:11 PM	Helium valve closed
3/6/2011	5:20:11 PM	H2 valve closed
3/6/2011	5:20:11 PM	BCl3 valve closed
3/6/2011	5:20:11 PM	PH3 valve closed
3/6/2011	5:20:11 PM	SiCl4 pre valve closed
3/6/2011	5:20:11 PM	SiCl4 post valve closed
3/6/2011	5:20:11 PM	Bubbler valve closed
3/6/2011	5:20:11 PM	Main Vac valve opened
3/6/2011	5:20:11 PM	Bypass valve opened
3/6/2011	5:20:11 PM	Helium MFC set to  0.000000
3/6/2011	5:20:11 PM	H2 MFC set to  0.000000
3/6/2011	5:20:11 PM	BCl3 MFC set to  0.000000
3/6/2011	5:20:11 PM	PHl3 MFC set to  0.000000
3/6/2011	5:20:11 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:20:11 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:20:11 PM	Tube furnace set to 0
3/6/2011	5:21:11 PM	H2 valve closed
3/6/2011	5:21:11 PM	BCl3 valve closed
3/6/2011	5:21:11 PM	PH3 valve closed
3/6/2011	5:21:11 PM	SiCl4 pre valve closed
3/6/2011	5:21:11 PM	SiCl4 post valve closed
3/6/2011	5:21:11 PM	Bubbler valve closed
3/6/2011	5:21:11 PM	Helium valve opened
3/6/2011	5:21:11 PM	Main Vac valve opened
3/6/2011	5:21:11 PM	Bypass valve opened
3/6/2011	5:21:11 PM	Helium MFC set to  100.000000
3/6/2011	5:21:11 PM	H2 MFC set to  0.000000
3/6/2011	5:21:11 PM	BCl3 MFC set to  0.000000
3/6/2011	5:21:11 PM	PHl3 MFC set to  0.000000
3/6/2011	5:21:11 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:21:11 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:21:11 PM	Tube furnace set to 0
3/6/2011	5:22:11 PM	Helium valve closed
3/6/2011	5:22:11 PM	H2 valve closed
3/6/2011	5:22:11 PM	BCl3 valve closed
3/6/2011	5:22:11 PM	PH3 valve closed
3/6/2011	5:22:11 PM	SiCl4 pre valve closed
3/6/2011	5:22:11 PM	SiCl4 post valve closed
3/6/2011	5:22:11 PM	Bubbler valve closed
3/6/2011	5:22:11 PM	Main Vac valve opened
3/6/2011	5:22:11 PM	Bypass valve opened
3/6/2011	5:22:11 PM	Helium MFC set to  0.000000
3/6/2011	5:22:11 PM	H2 MFC set to  0.000000
3/6/2011	5:22:11 PM	BCl3 MFC set to  0.000000
3/6/2011	5:22:11 PM	PHl3 MFC set to  0.000000
3/6/2011	5:22:11 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:22:11 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:22:12 PM	Tube furnace set to 0
3/6/2011	5:23:12 PM	H2 valve closed
3/6/2011	5:23:12 PM	BCl3 valve closed
3/6/2011	5:23:12 PM	PH3 valve closed
3/6/2011	5:23:12 PM	SiCl4 pre valve closed
3/6/2011	5:23:12 PM	SiCl4 post valve closed
3/6/2011	5:23:12 PM	Bubbler valve closed
3/6/2011	5:23:12 PM	Helium valve opened
3/6/2011	5:23:12 PM	Main Vac valve opened
3/6/2011	5:23:12 PM	Bypass valve opened
3/6/2011	5:23:12 PM	Helium MFC set to  100.000000
3/6/2011	5:23:12 PM	H2 MFC set to  0.000000
3/6/2011	5:23:12 PM	BCl3 MFC set to  0.000000
3/6/2011	5:23:12 PM	PHl3 MFC set to  0.000000
3/6/2011	5:23:12 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:23:12 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:23:12 PM	Tube furnace set to 0
3/6/2011	5:24:12 PM	Helium valve closed
3/6/2011	5:24:12 PM	H2 valve closed
3/6/2011	5:24:12 PM	BCl3 valve closed
3/6/2011	5:24:12 PM	PH3 valve closed
3/6/2011	5:24:12 PM	SiCl4 pre valve closed
3/6/2011	5:24:12 PM	SiCl4 post valve closed
3/6/2011	5:24:12 PM	Bubbler valve closed
3/6/2011	5:24:12 PM	Main Vac valve opened
3/6/2011	5:24:12 PM	Bypass valve opened
3/6/2011	5:24:12 PM	Helium MFC set to  0.000000
3/6/2011	5:24:12 PM	H2 MFC set to  0.000000
3/6/2011	5:24:12 PM	BCl3 MFC set to  0.000000
3/6/2011	5:24:12 PM	PHl3 MFC set to  0.000000
3/6/2011	5:24:12 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:24:12 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:24:12 PM	Tube furnace set to 0
3/6/2011	5:24:13 PM	Run finished at 5:24 PM
3/6/2011	5:24:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/6/2011	5:31:20 PM	Helium MFC set to  100.000000
3/6/2011	5:31:21 PM	Helium valve opened
3/6/2011	5:34:04 PM	Helium valve closed
3/6/2011	5:37:02 PM	Helium valve opened
3/6/2011	5:39:25 PM	Helium valve closed
3/6/2011	5:39:27 PM	Helium MFC set to  0.000000
3/6/2011	5:41:29 PM	Recipe started at 5:41 PM
3/6/2011	5:41:29 PM	Helium valve closed
3/6/2011	5:41:29 PM	BCl3 valve closed
3/6/2011	5:41:29 PM	PH3 valve closed
3/6/2011	5:41:29 PM	SiCl4 pre valve closed
3/6/2011	5:41:29 PM	SiCl4 post valve closed
3/6/2011	5:41:29 PM	Main Vac valve closed
3/6/2011	5:41:29 PM	Bypass valve closed
3/6/2011	5:41:29 PM	Bubbler valve closed
3/6/2011	5:41:29 PM	H2 valve opened
3/6/2011	5:41:29 PM	Helium MFC set to  0.000000
3/6/2011	5:41:29 PM	H2 MFC set to  500.000000
3/6/2011	5:41:29 PM	BCl3 MFC set to  0.000000
3/6/2011	5:41:29 PM	PHl3 MFC set to  0.000000
3/6/2011	5:41:29 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:41:29 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:41:29 PM	Tube furnace set to 200
3/6/2011	5:42:47 PM	Helium valve closed
3/6/2011	5:42:47 PM	BCl3 valve closed
3/6/2011	5:42:47 PM	PH3 valve closed
3/6/2011	5:42:47 PM	SiCl4 pre valve closed
3/6/2011	5:42:47 PM	SiCl4 post valve closed
3/6/2011	5:42:47 PM	Main Vac valve closed
3/6/2011	5:42:47 PM	Bypass valve closed
3/6/2011	5:42:47 PM	H2 valve opened
3/6/2011	5:42:47 PM	Bubbler valve opened
3/6/2011	5:42:47 PM	Helium MFC set to  0.000000
3/6/2011	5:42:47 PM	H2 MFC set to  400.000000
3/6/2011	5:42:47 PM	BCl3 MFC set to  0.000000
3/6/2011	5:42:47 PM	PHl3 MFC set to  0.000000
3/6/2011	5:42:47 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:42:47 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:42:47 PM	Tube furnace set to 1002
3/6/2011	5:59:27 PM	Helium valve closed
3/6/2011	5:59:27 PM	BCl3 valve closed
3/6/2011	5:59:27 PM	PH3 valve closed
3/6/2011	5:59:27 PM	SiCl4 pre valve closed
3/6/2011	5:59:27 PM	SiCl4 post valve closed
3/6/2011	5:59:27 PM	Main Vac valve closed
3/6/2011	5:59:27 PM	Bypass valve closed
3/6/2011	5:59:27 PM	H2 valve opened
3/6/2011	5:59:27 PM	Bubbler valve opened
3/6/2011	5:59:27 PM	Helium MFC set to  0.000000
3/6/2011	5:59:27 PM	H2 MFC set to  400.000000
3/6/2011	5:59:27 PM	BCl3 MFC set to  0.000000
3/6/2011	5:59:27 PM	PHl3 MFC set to  0.000000
3/6/2011	5:59:27 PM	SiCl4 MFC set to  0.000000
3/6/2011	5:59:27 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	5:59:27 PM	Tube furnace set to 1000
3/6/2011	6:03:47 PM	Helium valve closed
3/6/2011	6:03:47 PM	PH3 valve closed
3/6/2011	6:03:47 PM	Main Vac valve closed
3/6/2011	6:03:47 PM	Bypass valve closed
3/6/2011	6:03:47 PM	H2 valve opened
3/6/2011	6:03:47 PM	BCl3 valve opened
3/6/2011	6:03:47 PM	SiCl4 pre valve opened
3/6/2011	6:03:47 PM	SiCl4 post valve opened
3/6/2011	6:03:47 PM	Bubbler valve opened
3/6/2011	6:03:47 PM	Helium MFC set to  0.000000
3/6/2011	6:03:47 PM	H2 MFC set to  500.000000
3/6/2011	6:03:47 PM	BCl3 MFC set to  2.000000
3/6/2011	6:03:47 PM	PHl3 MFC set to  0.000000
3/6/2011	6:03:47 PM	SiCl4 MFC set to  50.000000
3/6/2011	6:03:47 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:03:47 PM	Tube furnace set to 1000
3/6/2011	6:13:47 PM	Helium valve closed
3/6/2011	6:13:47 PM	BCl3 valve closed
3/6/2011	6:13:47 PM	PH3 valve closed
3/6/2011	6:13:47 PM	SiCl4 pre valve closed
3/6/2011	6:13:47 PM	SiCl4 post valve closed
3/6/2011	6:13:47 PM	Main Vac valve closed
3/6/2011	6:13:47 PM	Bypass valve closed
3/6/2011	6:13:47 PM	H2 valve opened
3/6/2011	6:13:47 PM	Bubbler valve opened
3/6/2011	6:13:47 PM	Helium MFC set to  0.000000
3/6/2011	6:13:47 PM	H2 MFC set to  500.000000
3/6/2011	6:13:47 PM	BCl3 MFC set to  0.000000
3/6/2011	6:13:47 PM	PHl3 MFC set to  0.000000
3/6/2011	6:13:47 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:13:47 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:13:47 PM	Tube furnace set to 0
3/6/2011	6:16:32 PM	H2 valve closed
3/6/2011	6:16:32 PM	BCl3 valve closed
3/6/2011	6:16:32 PM	PH3 valve closed
3/6/2011	6:16:32 PM	SiCl4 pre valve closed
3/6/2011	6:16:32 PM	SiCl4 post valve closed
3/6/2011	6:16:32 PM	Main Vac valve closed
3/6/2011	6:16:33 PM	Bypass valve closed
3/6/2011	6:16:33 PM	Helium valve opened
3/6/2011	6:16:33 PM	Bubbler valve opened
3/6/2011	6:16:33 PM	Helium MFC set to  400.000000
3/6/2011	6:16:33 PM	H2 MFC set to  0.000000
3/6/2011	6:16:33 PM	BCl3 MFC set to  0.000000
3/6/2011	6:16:33 PM	PHl3 MFC set to  0.000000
3/6/2011	6:16:33 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:16:33 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:16:33 PM	Tube furnace set to 0
3/6/2011	6:36:33 PM	Helium valve closed
3/6/2011	6:36:33 PM	H2 valve closed
3/6/2011	6:36:33 PM	BCl3 valve closed
3/6/2011	6:36:33 PM	PH3 valve closed
3/6/2011	6:36:33 PM	SiCl4 pre valve closed
3/6/2011	6:36:33 PM	SiCl4 post valve closed
3/6/2011	6:36:33 PM	Main Vac valve closed
3/6/2011	6:36:33 PM	Bypass valve closed
3/6/2011	6:36:33 PM	Bubbler valve closed
3/6/2011	6:36:33 PM	Helium MFC set to  0.000000
3/6/2011	6:36:33 PM	H2 MFC set to  0.000000
3/6/2011	6:36:33 PM	BCl3 MFC set to  0.000000
3/6/2011	6:36:33 PM	PHl3 MFC set to  0.000000
3/6/2011	6:36:33 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:36:33 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:36:33 PM	Tube furnace set to 0
3/6/2011	6:36:33 PM	Run finished at 6:36 PM
3/6/2011	6:41:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/6/2011	6:42:05 PM	Recipe started at 6:41 PM
3/6/2011	6:42:05 PM	Helium valve closed
3/6/2011	6:42:05 PM	H2 valve closed
3/6/2011	6:42:05 PM	BCl3 valve closed
3/6/2011	6:42:05 PM	PH3 valve closed
3/6/2011	6:42:05 PM	SiCl4 pre valve closed
3/6/2011	6:42:05 PM	SiCl4 post valve closed
3/6/2011	6:42:05 PM	Main Vac valve closed
3/6/2011	6:42:05 PM	Bubbler valve closed
3/6/2011	6:42:05 PM	Bypass valve opened
3/6/2011	6:42:05 PM	Helium MFC set to  0.000000
3/6/2011	6:42:05 PM	H2 MFC set to  0.000000
3/6/2011	6:42:05 PM	BCl3 MFC set to  0.000000
3/6/2011	6:42:05 PM	PHl3 MFC set to  0.000000
3/6/2011	6:42:05 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:42:05 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:42:05 PM	Tube furnace set to 0
3/6/2011	6:42:36 PM	Helium valve closed
3/6/2011	6:42:36 PM	H2 valve closed
3/6/2011	6:42:36 PM	BCl3 valve closed
3/6/2011	6:42:36 PM	PH3 valve closed
3/6/2011	6:42:36 PM	SiCl4 pre valve closed
3/6/2011	6:42:36 PM	SiCl4 post valve closed
3/6/2011	6:42:36 PM	Bubbler valve closed
3/6/2011	6:42:36 PM	Main Vac valve opened
3/6/2011	6:42:36 PM	Bypass valve opened
3/6/2011	6:42:36 PM	Helium MFC set to  0.000000
3/6/2011	6:42:36 PM	H2 MFC set to  0.000000
3/6/2011	6:42:36 PM	BCl3 MFC set to  0.000000
3/6/2011	6:42:36 PM	PHl3 MFC set to  0.000000
3/6/2011	6:42:36 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:42:36 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:42:37 PM	Tube furnace set to 0
3/6/2011	6:43:37 PM	H2 valve closed
3/6/2011	6:43:37 PM	BCl3 valve closed
3/6/2011	6:43:37 PM	PH3 valve closed
3/6/2011	6:43:37 PM	SiCl4 pre valve closed
3/6/2011	6:43:37 PM	SiCl4 post valve closed
3/6/2011	6:43:37 PM	Bubbler valve closed
3/6/2011	6:43:37 PM	Helium valve opened
3/6/2011	6:43:37 PM	Main Vac valve opened
3/6/2011	6:43:37 PM	Bypass valve opened
3/6/2011	6:43:37 PM	Helium MFC set to  100.000000
3/6/2011	6:43:37 PM	H2 MFC set to  0.000000
3/6/2011	6:43:37 PM	BCl3 MFC set to  0.000000
3/6/2011	6:43:37 PM	PHl3 MFC set to  0.000000
3/6/2011	6:43:37 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:43:37 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:43:37 PM	Tube furnace set to 0
3/6/2011	6:44:37 PM	Helium valve closed
3/6/2011	6:44:37 PM	H2 valve closed
3/6/2011	6:44:37 PM	BCl3 valve closed
3/6/2011	6:44:37 PM	PH3 valve closed
3/6/2011	6:44:37 PM	SiCl4 pre valve closed
3/6/2011	6:44:37 PM	SiCl4 post valve closed
3/6/2011	6:44:37 PM	Bubbler valve closed
3/6/2011	6:44:37 PM	Main Vac valve opened
3/6/2011	6:44:37 PM	Bypass valve opened
3/6/2011	6:44:37 PM	Helium MFC set to  0.000000
3/6/2011	6:44:37 PM	H2 MFC set to  0.000000
3/6/2011	6:44:37 PM	BCl3 MFC set to  0.000000
3/6/2011	6:44:37 PM	PHl3 MFC set to  0.000000
3/6/2011	6:44:37 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:44:37 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:44:37 PM	Tube furnace set to 0
3/6/2011	6:45:37 PM	H2 valve closed
3/6/2011	6:45:37 PM	BCl3 valve closed
3/6/2011	6:45:37 PM	PH3 valve closed
3/6/2011	6:45:37 PM	SiCl4 pre valve closed
3/6/2011	6:45:37 PM	SiCl4 post valve closed
3/6/2011	6:45:37 PM	Bubbler valve closed
3/6/2011	6:45:37 PM	Helium valve opened
3/6/2011	6:45:37 PM	Main Vac valve opened
3/6/2011	6:45:37 PM	Bypass valve opened
3/6/2011	6:45:37 PM	Helium MFC set to  100.000000
3/6/2011	6:45:37 PM	H2 MFC set to  0.000000
3/6/2011	6:45:37 PM	BCl3 MFC set to  0.000000
3/6/2011	6:45:37 PM	PHl3 MFC set to  0.000000
3/6/2011	6:45:37 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:45:37 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:45:37 PM	Tube furnace set to 0
3/6/2011	6:46:37 PM	Helium valve closed
3/6/2011	6:46:37 PM	H2 valve closed
3/6/2011	6:46:37 PM	BCl3 valve closed
3/6/2011	6:46:37 PM	PH3 valve closed
3/6/2011	6:46:37 PM	SiCl4 pre valve closed
3/6/2011	6:46:37 PM	SiCl4 post valve closed
3/6/2011	6:46:37 PM	Bubbler valve closed
3/6/2011	6:46:37 PM	Main Vac valve opened
3/6/2011	6:46:37 PM	Bypass valve opened
3/6/2011	6:46:37 PM	Helium MFC set to  0.000000
3/6/2011	6:46:37 PM	H2 MFC set to  0.000000
3/6/2011	6:46:37 PM	BCl3 MFC set to  0.000000
3/6/2011	6:46:37 PM	PHl3 MFC set to  0.000000
3/6/2011	6:46:37 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:46:37 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:46:37 PM	Tube furnace set to 0
3/6/2011	6:47:37 PM	H2 valve closed
3/6/2011	6:47:37 PM	BCl3 valve closed
3/6/2011	6:47:37 PM	PH3 valve closed
3/6/2011	6:47:37 PM	SiCl4 pre valve closed
3/6/2011	6:47:37 PM	SiCl4 post valve closed
3/6/2011	6:47:37 PM	Bubbler valve closed
3/6/2011	6:47:37 PM	Helium valve opened
3/6/2011	6:47:37 PM	Main Vac valve opened
3/6/2011	6:47:37 PM	Bypass valve opened
3/6/2011	6:47:37 PM	Helium MFC set to  100.000000
3/6/2011	6:47:37 PM	H2 MFC set to  0.000000
3/6/2011	6:47:37 PM	BCl3 MFC set to  0.000000
3/6/2011	6:47:37 PM	PHl3 MFC set to  0.000000
3/6/2011	6:47:37 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:47:37 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:47:38 PM	Tube furnace set to 0
3/6/2011	6:48:38 PM	Helium valve closed
3/6/2011	6:48:38 PM	H2 valve closed
3/6/2011	6:48:38 PM	BCl3 valve closed
3/6/2011	6:48:38 PM	PH3 valve closed
3/6/2011	6:48:38 PM	SiCl4 pre valve closed
3/6/2011	6:48:38 PM	SiCl4 post valve closed
3/6/2011	6:48:38 PM	Bubbler valve closed
3/6/2011	6:48:38 PM	Main Vac valve opened
3/6/2011	6:48:38 PM	Bypass valve opened
3/6/2011	6:48:38 PM	Helium MFC set to  0.000000
3/6/2011	6:48:38 PM	H2 MFC set to  0.000000
3/6/2011	6:48:38 PM	BCl3 MFC set to  0.000000
3/6/2011	6:48:38 PM	PHl3 MFC set to  0.000000
3/6/2011	6:48:38 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:48:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:48:38 PM	Tube furnace set to 0
3/6/2011	6:49:38 PM	H2 valve closed
3/6/2011	6:49:38 PM	BCl3 valve closed
3/6/2011	6:49:38 PM	PH3 valve closed
3/6/2011	6:49:38 PM	SiCl4 pre valve closed
3/6/2011	6:49:38 PM	SiCl4 post valve closed
3/6/2011	6:49:38 PM	Bubbler valve closed
3/6/2011	6:49:38 PM	Helium valve opened
3/6/2011	6:49:38 PM	Main Vac valve opened
3/6/2011	6:49:38 PM	Bypass valve opened
3/6/2011	6:49:38 PM	Helium MFC set to  100.000000
3/6/2011	6:49:38 PM	H2 MFC set to  0.000000
3/6/2011	6:49:38 PM	BCl3 MFC set to  0.000000
3/6/2011	6:49:38 PM	PHl3 MFC set to  0.000000
3/6/2011	6:49:38 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:49:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:49:38 PM	Tube furnace set to 0
3/6/2011	6:50:38 PM	Helium valve closed
3/6/2011	6:50:38 PM	H2 valve closed
3/6/2011	6:50:38 PM	BCl3 valve closed
3/6/2011	6:50:38 PM	PH3 valve closed
3/6/2011	6:50:38 PM	SiCl4 pre valve closed
3/6/2011	6:50:38 PM	SiCl4 post valve closed
3/6/2011	6:50:38 PM	Bubbler valve closed
3/6/2011	6:50:38 PM	Main Vac valve opened
3/6/2011	6:50:38 PM	Bypass valve opened
3/6/2011	6:50:38 PM	Helium MFC set to  0.000000
3/6/2011	6:50:38 PM	H2 MFC set to  0.000000
3/6/2011	6:50:38 PM	BCl3 MFC set to  0.000000
3/6/2011	6:50:38 PM	PHl3 MFC set to  0.000000
3/6/2011	6:50:38 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:50:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:50:38 PM	Tube furnace set to 0
3/6/2011	6:51:38 PM	H2 valve closed
3/6/2011	6:51:38 PM	BCl3 valve closed
3/6/2011	6:51:38 PM	PH3 valve closed
3/6/2011	6:51:38 PM	SiCl4 pre valve closed
3/6/2011	6:51:38 PM	SiCl4 post valve closed
3/6/2011	6:51:38 PM	Bubbler valve closed
3/6/2011	6:51:38 PM	Helium valve opened
3/6/2011	6:51:38 PM	Main Vac valve opened
3/6/2011	6:51:38 PM	Bypass valve opened
3/6/2011	6:51:38 PM	Helium MFC set to  100.000000
3/6/2011	6:51:38 PM	H2 MFC set to  0.000000
3/6/2011	6:51:38 PM	BCl3 MFC set to  0.000000
3/6/2011	6:51:38 PM	PHl3 MFC set to  0.000000
3/6/2011	6:51:38 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:51:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:51:38 PM	Tube furnace set to 0
3/6/2011	6:52:38 PM	Helium valve closed
3/6/2011	6:52:38 PM	H2 valve closed
3/6/2011	6:52:38 PM	BCl3 valve closed
3/6/2011	6:52:38 PM	PH3 valve closed
3/6/2011	6:52:38 PM	SiCl4 pre valve closed
3/6/2011	6:52:38 PM	SiCl4 post valve closed
3/6/2011	6:52:38 PM	Bubbler valve closed
3/6/2011	6:52:38 PM	Main Vac valve opened
3/6/2011	6:52:38 PM	Bypass valve opened
3/6/2011	6:52:38 PM	Helium MFC set to  0.000000
3/6/2011	6:52:38 PM	H2 MFC set to  0.000000
3/6/2011	6:52:38 PM	BCl3 MFC set to  0.000000
3/6/2011	6:52:38 PM	PHl3 MFC set to  0.000000
3/6/2011	6:52:38 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:52:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:52:39 PM	Tube furnace set to 0
3/6/2011	6:53:39 PM	H2 valve closed
3/6/2011	6:53:39 PM	BCl3 valve closed
3/6/2011	6:53:39 PM	PH3 valve closed
3/6/2011	6:53:39 PM	SiCl4 pre valve closed
3/6/2011	6:53:39 PM	SiCl4 post valve closed
3/6/2011	6:53:39 PM	Bubbler valve closed
3/6/2011	6:53:39 PM	Helium valve opened
3/6/2011	6:53:39 PM	Main Vac valve opened
3/6/2011	6:53:39 PM	Bypass valve opened
3/6/2011	6:53:39 PM	Helium MFC set to  100.000000
3/6/2011	6:53:39 PM	H2 MFC set to  0.000000
3/6/2011	6:53:39 PM	BCl3 MFC set to  0.000000
3/6/2011	6:53:39 PM	PHl3 MFC set to  0.000000
3/6/2011	6:53:39 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:53:39 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:53:39 PM	Tube furnace set to 0
3/6/2011	6:54:39 PM	Helium valve closed
3/6/2011	6:54:39 PM	H2 valve closed
3/6/2011	6:54:39 PM	BCl3 valve closed
3/6/2011	6:54:39 PM	PH3 valve closed
3/6/2011	6:54:39 PM	SiCl4 pre valve closed
3/6/2011	6:54:39 PM	SiCl4 post valve closed
3/6/2011	6:54:39 PM	Bubbler valve closed
3/6/2011	6:54:39 PM	Main Vac valve opened
3/6/2011	6:54:39 PM	Bypass valve opened
3/6/2011	6:54:39 PM	Helium MFC set to  0.000000
3/6/2011	6:54:39 PM	H2 MFC set to  0.000000
3/6/2011	6:54:39 PM	BCl3 MFC set to  0.000000
3/6/2011	6:54:39 PM	PHl3 MFC set to  0.000000
3/6/2011	6:54:39 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:54:39 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:54:39 PM	Tube furnace set to 0
3/6/2011	6:55:39 PM	H2 valve closed
3/6/2011	6:55:39 PM	BCl3 valve closed
3/6/2011	6:55:39 PM	PH3 valve closed
3/6/2011	6:55:39 PM	SiCl4 pre valve closed
3/6/2011	6:55:39 PM	SiCl4 post valve closed
3/6/2011	6:55:39 PM	Bubbler valve closed
3/6/2011	6:55:39 PM	Helium valve opened
3/6/2011	6:55:39 PM	Main Vac valve opened
3/6/2011	6:55:39 PM	Bypass valve opened
3/6/2011	6:55:39 PM	Helium MFC set to  100.000000
3/6/2011	6:55:39 PM	H2 MFC set to  0.000000
3/6/2011	6:55:39 PM	BCl3 MFC set to  0.000000
3/6/2011	6:55:39 PM	PHl3 MFC set to  0.000000
3/6/2011	6:55:39 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:55:39 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:55:39 PM	Tube furnace set to 0
3/6/2011	6:56:39 PM	Helium valve closed
3/6/2011	6:56:39 PM	H2 valve closed
3/6/2011	6:56:39 PM	BCl3 valve closed
3/6/2011	6:56:39 PM	PH3 valve closed
3/6/2011	6:56:39 PM	SiCl4 pre valve closed
3/6/2011	6:56:39 PM	SiCl4 post valve closed
3/6/2011	6:56:39 PM	Bubbler valve closed
3/6/2011	6:56:39 PM	Main Vac valve opened
3/6/2011	6:56:39 PM	Bypass valve opened
3/6/2011	6:56:39 PM	Helium MFC set to  0.000000
3/6/2011	6:56:39 PM	H2 MFC set to  0.000000
3/6/2011	6:56:39 PM	BCl3 MFC set to  0.000000
3/6/2011	6:56:39 PM	PHl3 MFC set to  0.000000
3/6/2011	6:56:39 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:56:39 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:56:39 PM	Tube furnace set to 0
3/6/2011	6:57:39 PM	H2 valve closed
3/6/2011	6:57:39 PM	BCl3 valve closed
3/6/2011	6:57:39 PM	PH3 valve closed
3/6/2011	6:57:39 PM	SiCl4 pre valve closed
3/6/2011	6:57:39 PM	SiCl4 post valve closed
3/6/2011	6:57:39 PM	Bubbler valve closed
3/6/2011	6:57:39 PM	Helium valve opened
3/6/2011	6:57:39 PM	Main Vac valve opened
3/6/2011	6:57:39 PM	Bypass valve opened
3/6/2011	6:57:39 PM	Helium MFC set to  100.000000
3/6/2011	6:57:39 PM	H2 MFC set to  0.000000
3/6/2011	6:57:39 PM	BCl3 MFC set to  0.000000
3/6/2011	6:57:39 PM	PHl3 MFC set to  0.000000
3/6/2011	6:57:39 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:57:39 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:57:40 PM	Tube furnace set to 0
3/6/2011	6:58:40 PM	Helium valve closed
3/6/2011	6:58:40 PM	H2 valve closed
3/6/2011	6:58:40 PM	BCl3 valve closed
3/6/2011	6:58:40 PM	PH3 valve closed
3/6/2011	6:58:40 PM	SiCl4 pre valve closed
3/6/2011	6:58:40 PM	SiCl4 post valve closed
3/6/2011	6:58:40 PM	Bubbler valve closed
3/6/2011	6:58:40 PM	Main Vac valve opened
3/6/2011	6:58:40 PM	Bypass valve opened
3/6/2011	6:58:40 PM	Helium MFC set to  0.000000
3/6/2011	6:58:40 PM	H2 MFC set to  0.000000
3/6/2011	6:58:40 PM	BCl3 MFC set to  0.000000
3/6/2011	6:58:40 PM	PHl3 MFC set to  0.000000
3/6/2011	6:58:40 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:58:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:58:40 PM	Tube furnace set to 0
3/6/2011	6:59:40 PM	H2 valve closed
3/6/2011	6:59:40 PM	BCl3 valve closed
3/6/2011	6:59:40 PM	PH3 valve closed
3/6/2011	6:59:40 PM	SiCl4 pre valve closed
3/6/2011	6:59:40 PM	SiCl4 post valve closed
3/6/2011	6:59:40 PM	Bubbler valve closed
3/6/2011	6:59:40 PM	Helium valve opened
3/6/2011	6:59:40 PM	Main Vac valve opened
3/6/2011	6:59:40 PM	Bypass valve opened
3/6/2011	6:59:40 PM	Helium MFC set to  100.000000
3/6/2011	6:59:40 PM	H2 MFC set to  0.000000
3/6/2011	6:59:40 PM	BCl3 MFC set to  0.000000
3/6/2011	6:59:40 PM	PHl3 MFC set to  0.000000
3/6/2011	6:59:40 PM	SiCl4 MFC set to  0.000000
3/6/2011	6:59:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	6:59:40 PM	Tube furnace set to 0
3/6/2011	7:00:40 PM	Helium valve closed
3/6/2011	7:00:40 PM	H2 valve closed
3/6/2011	7:00:40 PM	BCl3 valve closed
3/6/2011	7:00:40 PM	PH3 valve closed
3/6/2011	7:00:40 PM	SiCl4 pre valve closed
3/6/2011	7:00:40 PM	SiCl4 post valve closed
3/6/2011	7:00:40 PM	Bubbler valve closed
3/6/2011	7:00:40 PM	Main Vac valve opened
3/6/2011	7:00:40 PM	Bypass valve opened
3/6/2011	7:00:40 PM	Helium MFC set to  0.000000
3/6/2011	7:00:40 PM	H2 MFC set to  0.000000
3/6/2011	7:00:40 PM	BCl3 MFC set to  0.000000
3/6/2011	7:00:40 PM	PHl3 MFC set to  0.000000
3/6/2011	7:00:40 PM	SiCl4 MFC set to  0.000000
3/6/2011	7:00:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	7:00:40 PM	Tube furnace set to 0
3/6/2011	7:01:40 PM	H2 valve closed
3/6/2011	7:01:40 PM	BCl3 valve closed
3/6/2011	7:01:40 PM	PH3 valve closed
3/6/2011	7:01:40 PM	SiCl4 pre valve closed
3/6/2011	7:01:40 PM	SiCl4 post valve closed
3/6/2011	7:01:40 PM	Bubbler valve closed
3/6/2011	7:01:40 PM	Helium valve opened
3/6/2011	7:01:40 PM	Main Vac valve opened
3/6/2011	7:01:40 PM	Bypass valve opened
3/6/2011	7:01:40 PM	Helium MFC set to  100.000000
3/6/2011	7:01:40 PM	H2 MFC set to  0.000000
3/6/2011	7:01:40 PM	BCl3 MFC set to  0.000000
3/6/2011	7:01:40 PM	PHl3 MFC set to  0.000000
3/6/2011	7:01:40 PM	SiCl4 MFC set to  0.000000
3/6/2011	7:01:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	7:01:40 PM	Tube furnace set to 0
3/6/2011	7:02:40 PM	Helium valve closed
3/6/2011	7:02:40 PM	H2 valve closed
3/6/2011	7:02:40 PM	BCl3 valve closed
3/6/2011	7:02:40 PM	PH3 valve closed
3/6/2011	7:02:40 PM	SiCl4 pre valve closed
3/6/2011	7:02:40 PM	SiCl4 post valve closed
3/6/2011	7:02:40 PM	Bubbler valve closed
3/6/2011	7:02:40 PM	Main Vac valve opened
3/6/2011	7:02:40 PM	Bypass valve opened
3/6/2011	7:02:40 PM	Helium MFC set to  0.000000
3/6/2011	7:02:40 PM	H2 MFC set to  0.000000
3/6/2011	7:02:40 PM	BCl3 MFC set to  0.000000
3/6/2011	7:02:40 PM	PHl3 MFC set to  0.000000
3/6/2011	7:02:40 PM	SiCl4 MFC set to  0.000000
3/6/2011	7:02:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	7:02:40 PM	Tube furnace set to 0
3/6/2011	7:02:41 PM	Run finished at 7:02 PM
3/6/2011	7:02:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/6/2011	8:39:48 PM	Helium MFC set to  100.000000
3/6/2011	8:39:50 PM	Helium valve opened
3/6/2011	8:39:53 PM	Tube furnace set to 100
3/6/2011	8:48:06 PM	Helium MFC set to  0.000000
3/6/2011	8:48:06 PM	Helium valve closed
3/6/2011	8:48:07 PM	Helium valve opened
3/6/2011	8:48:08 PM	Helium valve closed
3/6/2011	8:49:10 PM	Main Vac valve closed
3/6/2011	8:49:12 PM	Bypass valve closed
3/6/2011	8:49:16 PM	Bypass valve opened
3/6/2011	8:49:18 PM	Main Vac valve opened
3/6/2011	8:50:06 PM	Recipe started at 8:50 PM
3/6/2011	8:50:06 PM	Helium valve closed
3/6/2011	8:50:06 PM	BCl3 valve closed
3/6/2011	8:50:06 PM	PH3 valve closed
3/6/2011	8:50:06 PM	SiCl4 pre valve closed
3/6/2011	8:50:06 PM	SiCl4 post valve closed
3/6/2011	8:50:06 PM	Main Vac valve closed
3/6/2011	8:50:06 PM	Bypass valve closed
3/6/2011	8:50:06 PM	Bubbler valve closed
3/6/2011	8:50:06 PM	H2 valve opened
3/6/2011	8:50:06 PM	Helium MFC set to  0.000000
3/6/2011	8:50:06 PM	H2 MFC set to  500.000000
3/6/2011	8:50:06 PM	BCl3 MFC set to  0.000000
3/6/2011	8:50:06 PM	PHl3 MFC set to  0.000000
3/6/2011	8:50:06 PM	SiCl4 MFC set to  0.000000
3/6/2011	8:50:06 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	8:50:06 PM	Tube furnace set to 200
3/6/2011	8:51:25 PM	Helium valve closed
3/6/2011	8:51:25 PM	BCl3 valve closed
3/6/2011	8:51:25 PM	PH3 valve closed
3/6/2011	8:51:25 PM	SiCl4 pre valve closed
3/6/2011	8:51:25 PM	SiCl4 post valve closed
3/6/2011	8:51:25 PM	Main Vac valve closed
3/6/2011	8:51:25 PM	Bypass valve closed
3/6/2011	8:51:25 PM	H2 valve opened
3/6/2011	8:51:26 PM	Bubbler valve opened
3/6/2011	8:51:26 PM	Helium MFC set to  0.000000
3/6/2011	8:51:26 PM	H2 MFC set to  400.000000
3/6/2011	8:51:26 PM	BCl3 MFC set to  0.000000
3/6/2011	8:51:26 PM	PHl3 MFC set to  0.000000
3/6/2011	8:51:26 PM	SiCl4 MFC set to  0.000000
3/6/2011	8:51:26 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	8:51:26 PM	Tube furnace set to 1002
3/6/2011	9:08:06 PM	Helium valve closed
3/6/2011	9:08:06 PM	BCl3 valve closed
3/6/2011	9:08:06 PM	PH3 valve closed
3/6/2011	9:08:06 PM	SiCl4 pre valve closed
3/6/2011	9:08:06 PM	SiCl4 post valve closed
3/6/2011	9:08:06 PM	Main Vac valve closed
3/6/2011	9:08:06 PM	Bypass valve closed
3/6/2011	9:08:06 PM	H2 valve opened
3/6/2011	9:08:06 PM	Bubbler valve opened
3/6/2011	9:08:06 PM	Helium MFC set to  0.000000
3/6/2011	9:08:06 PM	H2 MFC set to  400.000000
3/6/2011	9:08:06 PM	BCl3 MFC set to  0.000000
3/6/2011	9:08:06 PM	PHl3 MFC set to  0.000000
3/6/2011	9:08:06 PM	SiCl4 MFC set to  0.000000
3/6/2011	9:08:06 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:08:06 PM	Tube furnace set to 1000
3/6/2011	9:12:26 PM	Helium valve closed
3/6/2011	9:12:26 PM	PH3 valve closed
3/6/2011	9:12:26 PM	Main Vac valve closed
3/6/2011	9:12:26 PM	Bypass valve closed
3/6/2011	9:12:26 PM	H2 valve opened
3/6/2011	9:12:26 PM	BCl3 valve opened
3/6/2011	9:12:26 PM	SiCl4 pre valve opened
3/6/2011	9:12:26 PM	SiCl4 post valve opened
3/6/2011	9:12:26 PM	Bubbler valve opened
3/6/2011	9:12:26 PM	Helium MFC set to  0.000000
3/6/2011	9:12:26 PM	H2 MFC set to  500.000000
3/6/2011	9:12:26 PM	BCl3 MFC set to  2.500000
3/6/2011	9:12:26 PM	PHl3 MFC set to  0.000000
3/6/2011	9:12:26 PM	SiCl4 MFC set to  50.000000
3/6/2011	9:12:26 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:12:26 PM	Tube furnace set to 1000
3/6/2011	9:32:26 PM	Helium valve closed
3/6/2011	9:32:26 PM	BCl3 valve closed
3/6/2011	9:32:26 PM	PH3 valve closed
3/6/2011	9:32:26 PM	SiCl4 pre valve closed
3/6/2011	9:32:26 PM	SiCl4 post valve closed
3/6/2011	9:32:26 PM	Main Vac valve closed
3/6/2011	9:32:26 PM	Bypass valve closed
3/6/2011	9:32:26 PM	H2 valve opened
3/6/2011	9:32:26 PM	Bubbler valve opened
3/6/2011	9:32:26 PM	Helium MFC set to  0.000000
3/6/2011	9:32:26 PM	H2 MFC set to  500.000000
3/6/2011	9:32:26 PM	BCl3 MFC set to  0.000000
3/6/2011	9:32:26 PM	PHl3 MFC set to  0.000000
3/6/2011	9:32:26 PM	SiCl4 MFC set to  0.000000
3/6/2011	9:32:26 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:32:26 PM	Tube furnace set to 0
3/6/2011	9:35:18 PM	H2 valve closed
3/6/2011	9:35:18 PM	BCl3 valve closed
3/6/2011	9:35:18 PM	PH3 valve closed
3/6/2011	9:35:18 PM	SiCl4 pre valve closed
3/6/2011	9:35:18 PM	SiCl4 post valve closed
3/6/2011	9:35:18 PM	Main Vac valve closed
3/6/2011	9:35:18 PM	Bypass valve closed
3/6/2011	9:35:18 PM	Helium valve opened
3/6/2011	9:35:18 PM	Bubbler valve opened
3/6/2011	9:35:18 PM	Helium MFC set to  400.000000
3/6/2011	9:35:18 PM	H2 MFC set to  0.000000
3/6/2011	9:35:18 PM	BCl3 MFC set to  0.000000
3/6/2011	9:35:18 PM	PHl3 MFC set to  0.000000
3/6/2011	9:35:18 PM	SiCl4 MFC set to  0.000000
3/6/2011	9:35:18 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:35:19 PM	Tube furnace set to 0
3/6/2011	9:53:12 PM	Helium valve closed
3/6/2011	9:53:12 PM	H2 valve closed
3/6/2011	9:53:12 PM	BCl3 valve closed
3/6/2011	9:53:12 PM	PH3 valve closed
3/6/2011	9:53:12 PM	SiCl4 pre valve closed
3/6/2011	9:53:12 PM	SiCl4 post valve closed
3/6/2011	9:53:12 PM	Main Vac valve closed
3/6/2011	9:53:12 PM	Bypass valve closed
3/6/2011	9:53:12 PM	Bubbler valve closed
3/6/2011	9:53:12 PM	Helium MFC set to  0.000000
3/6/2011	9:53:12 PM	H2 MFC set to  0.000000
3/6/2011	9:53:12 PM	BCl3 MFC set to  0.000000
3/6/2011	9:53:12 PM	PHl3 MFC set to  0.000000
3/6/2011	9:53:12 PM	SiCl4 MFC set to  0.000000
3/6/2011	9:53:12 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:53:12 PM	Tube furnace set to 0
3/6/2011	9:53:13 PM	Run finished at 9:53 PM
3/6/2011	9:55:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	9:55:31 PM	Recipe started at 9:55 PM
3/6/2011	9:55:31 PM	Helium valve closed
3/6/2011	9:55:31 PM	H2 valve closed
3/6/2011	9:55:31 PM	BCl3 valve closed
3/6/2011	9:55:31 PM	PH3 valve closed
3/6/2011	9:55:31 PM	SiCl4 pre valve closed
3/6/2011	9:55:31 PM	SiCl4 post valve closed
3/6/2011	9:55:31 PM	Main Vac valve closed
3/6/2011	9:55:31 PM	Bubbler valve closed
3/6/2011	9:55:31 PM	Bypass valve opened
3/6/2011	9:55:31 PM	Helium MFC set to  0.000000
3/6/2011	9:55:31 PM	H2 MFC set to  0.000000
3/6/2011	9:55:31 PM	BCl3 MFC set to  0.000000
3/6/2011	9:55:31 PM	PHl3 MFC set to  0.000000
3/6/2011	9:55:31 PM	SiCl4 MFC set to  0.000000
3/6/2011	9:55:31 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:55:31 PM	Tube furnace set to 0
3/6/2011	9:56:01 PM	Helium valve closed
3/6/2011	9:56:01 PM	H2 valve closed
3/6/2011	9:56:01 PM	BCl3 valve closed
3/6/2011	9:56:01 PM	PH3 valve closed
3/6/2011	9:56:01 PM	SiCl4 pre valve closed
3/6/2011	9:56:01 PM	SiCl4 post valve closed
3/6/2011	9:56:01 PM	Bubbler valve closed
3/6/2011	9:56:01 PM	Main Vac valve opened
3/6/2011	9:56:01 PM	Bypass valve opened
3/6/2011	9:56:01 PM	Helium MFC set to  0.000000
3/6/2011	9:56:01 PM	H2 MFC set to  0.000000
3/6/2011	9:56:01 PM	BCl3 MFC set to  0.000000
3/6/2011	9:56:01 PM	PHl3 MFC set to  0.000000
3/6/2011	9:56:01 PM	SiCl4 MFC set to  0.000000
3/6/2011	9:56:01 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	9:56:01 PM	Tube furnace set to 0
3/6/2011	9:56:02 PM	Run finished at 9:56 PM
3/6/2011	9:56:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	9:58:45 PM	Helium MFC set to  100.000000
3/6/2011	9:58:47 PM	Helium valve opened
3/6/2011	9:59:19 PM	Helium valve closed
3/6/2011	9:59:50 PM	Helium valve opened
3/6/2011	10:00:58 PM	Helium valve closed
3/6/2011	10:01:35 PM	Helium valve opened
3/6/2011	10:03:28 PM	Helium valve closed
3/6/2011	10:04:13 PM	Helium MFC set to  100.000000
3/6/2011	10:04:14 PM	Helium valve opened
3/6/2011	10:06:05 PM	Helium valve closed
3/6/2011	10:07:07 PM	Helium valve opened
3/6/2011	10:07:52 PM	Helium valve closed
3/6/2011	10:08:55 PM	Helium valve opened
3/6/2011	10:11:16 PM	Helium valve closed
3/6/2011	10:12:45 PM	Main Vac valve closed
3/6/2011	10:12:47 PM	Helium valve opened
3/6/2011	10:13:04 PM	Main Vac valve opened
3/6/2011	10:13:10 PM	Helium valve closed
3/6/2011	10:14:04 PM	Helium valve opened
3/6/2011	10:14:05 PM	Main Vac valve closed
3/6/2011	10:14:07 PM	Bypass valve closed
3/6/2011	10:14:40 PM	Helium valve closed
3/6/2011	10:14:42 PM	Bypass valve opened
3/6/2011	10:14:48 PM	Main Vac valve opened
3/6/2011	10:16:53 PM	Helium valve opened
3/6/2011	10:17:44 PM	Helium valve closed
3/6/2011	10:19:58 PM	Helium valve opened
3/6/2011	10:21:52 PM	Helium valve closed
3/6/2011	10:21:54 PM	Helium MFC set to  0.000000
3/6/2011	10:21:56 PM	Helium valve opened
3/6/2011	10:21:57 PM	Helium valve closed
3/6/2011	10:22:34 PM	Main Vac valve closed
3/6/2011	10:22:36 PM	Bypass valve closed
3/6/2011	10:22:48 PM	Bypass valve opened
3/6/2011	10:22:48 PM	Main Vac valve opened
3/6/2011	10:22:51 PM	Helium valve opened
3/6/2011	10:23:30 PM	Helium MFC set to  100.000000
3/6/2011	10:25:35 PM	Helium valve closed
3/6/2011	10:25:38 PM	Helium MFC set to  0.000000
3/6/2011	10:26:22 PM	Recipe started at 10:26 PM
3/6/2011	10:26:22 PM	Helium valve closed
3/6/2011	10:26:22 PM	BCl3 valve closed
3/6/2011	10:26:22 PM	PH3 valve closed
3/6/2011	10:26:22 PM	SiCl4 pre valve closed
3/6/2011	10:26:22 PM	SiCl4 post valve closed
3/6/2011	10:26:22 PM	Main Vac valve closed
3/6/2011	10:26:22 PM	Bypass valve closed
3/6/2011	10:26:22 PM	Bubbler valve closed
3/6/2011	10:26:22 PM	H2 valve opened
3/6/2011	10:26:22 PM	Helium MFC set to  0.000000
3/6/2011	10:26:22 PM	H2 MFC set to  500.000000
3/6/2011	10:26:22 PM	BCl3 MFC set to  0.000000
3/6/2011	10:26:22 PM	PHl3 MFC set to  0.000000
3/6/2011	10:26:22 PM	SiCl4 MFC set to  0.000000
3/6/2011	10:26:22 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	10:26:22 PM	Tube furnace set to 200
3/6/2011	10:27:40 PM	Helium valve closed
3/6/2011	10:27:40 PM	BCl3 valve closed
3/6/2011	10:27:40 PM	PH3 valve closed
3/6/2011	10:27:40 PM	SiCl4 pre valve closed
3/6/2011	10:27:40 PM	SiCl4 post valve closed
3/6/2011	10:27:40 PM	Main Vac valve closed
3/6/2011	10:27:40 PM	Bypass valve closed
3/6/2011	10:27:40 PM	H2 valve opened
3/6/2011	10:27:40 PM	Bubbler valve opened
3/6/2011	10:27:40 PM	Helium MFC set to  0.000000
3/6/2011	10:27:40 PM	H2 MFC set to  400.000000
3/6/2011	10:27:40 PM	BCl3 MFC set to  0.000000
3/6/2011	10:27:40 PM	PHl3 MFC set to  0.000000
3/6/2011	10:27:40 PM	SiCl4 MFC set to  0.000000
3/6/2011	10:27:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	10:27:41 PM	Tube furnace set to 1002
3/6/2011	10:44:21 PM	Helium valve closed
3/6/2011	10:44:21 PM	BCl3 valve closed
3/6/2011	10:44:21 PM	PH3 valve closed
3/6/2011	10:44:21 PM	SiCl4 pre valve closed
3/6/2011	10:44:21 PM	SiCl4 post valve closed
3/6/2011	10:44:21 PM	Main Vac valve closed
3/6/2011	10:44:21 PM	Bypass valve closed
3/6/2011	10:44:21 PM	H2 valve opened
3/6/2011	10:44:21 PM	Bubbler valve opened
3/6/2011	10:44:21 PM	Helium MFC set to  0.000000
3/6/2011	10:44:21 PM	H2 MFC set to  400.000000
3/6/2011	10:44:21 PM	BCl3 MFC set to  0.000000
3/6/2011	10:44:21 PM	PHl3 MFC set to  0.000000
3/6/2011	10:44:21 PM	SiCl4 MFC set to  0.000000
3/6/2011	10:44:21 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	10:44:21 PM	Tube furnace set to 1000
3/6/2011	10:48:41 PM	Helium valve closed
3/6/2011	10:48:41 PM	PH3 valve closed
3/6/2011	10:48:41 PM	Main Vac valve closed
3/6/2011	10:48:41 PM	Bypass valve closed
3/6/2011	10:48:41 PM	H2 valve opened
3/6/2011	10:48:41 PM	BCl3 valve opened
3/6/2011	10:48:41 PM	SiCl4 pre valve opened
3/6/2011	10:48:41 PM	SiCl4 post valve opened
3/6/2011	10:48:41 PM	Bubbler valve opened
3/6/2011	10:48:41 PM	Helium MFC set to  0.000000
3/6/2011	10:48:41 PM	H2 MFC set to  500.000000
3/6/2011	10:48:41 PM	BCl3 MFC set to  2.500000
3/6/2011	10:48:41 PM	PHl3 MFC set to  0.000000
3/6/2011	10:48:41 PM	SiCl4 MFC set to  50.000000
3/6/2011	10:48:41 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	10:48:41 PM	Tube furnace set to 1000
3/6/2011	11:08:41 PM	Helium valve closed
3/6/2011	11:08:41 PM	BCl3 valve closed
3/6/2011	11:08:41 PM	PH3 valve closed
3/6/2011	11:08:41 PM	SiCl4 pre valve closed
3/6/2011	11:08:41 PM	SiCl4 post valve closed
3/6/2011	11:08:41 PM	Main Vac valve closed
3/6/2011	11:08:41 PM	Bypass valve closed
3/6/2011	11:08:41 PM	H2 valve opened
3/6/2011	11:08:41 PM	Bubbler valve opened
3/6/2011	11:08:41 PM	Helium MFC set to  0.000000
3/6/2011	11:08:41 PM	H2 MFC set to  500.000000
3/6/2011	11:08:41 PM	BCl3 MFC set to  0.000000
3/6/2011	11:08:41 PM	PHl3 MFC set to  0.000000
3/6/2011	11:08:41 PM	SiCl4 MFC set to  0.000000
3/6/2011	11:08:41 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	11:08:41 PM	Tube furnace set to 0
3/6/2011	11:11:39 PM	H2 valve closed
3/6/2011	11:11:39 PM	BCl3 valve closed
3/6/2011	11:11:39 PM	PH3 valve closed
3/6/2011	11:11:39 PM	SiCl4 pre valve closed
3/6/2011	11:11:39 PM	SiCl4 post valve closed
3/6/2011	11:11:39 PM	Main Vac valve closed
3/6/2011	11:11:39 PM	Bypass valve closed
3/6/2011	11:11:39 PM	Helium valve opened
3/6/2011	11:11:39 PM	Bubbler valve opened
3/6/2011	11:11:39 PM	Helium MFC set to  400.000000
3/6/2011	11:11:39 PM	H2 MFC set to  0.000000
3/6/2011	11:11:39 PM	BCl3 MFC set to  0.000000
3/6/2011	11:11:39 PM	PHl3 MFC set to  0.000000
3/6/2011	11:11:39 PM	SiCl4 MFC set to  0.000000
3/6/2011	11:11:39 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	11:11:39 PM	Tube furnace set to 0
3/6/2011	11:31:29 PM	Helium valve closed
3/6/2011	11:31:29 PM	H2 valve closed
3/6/2011	11:31:29 PM	BCl3 valve closed
3/6/2011	11:31:29 PM	PH3 valve closed
3/6/2011	11:31:30 PM	SiCl4 pre valve closed
3/6/2011	11:31:30 PM	SiCl4 post valve closed
3/6/2011	11:31:30 PM	Main Vac valve closed
3/6/2011	11:31:30 PM	Bypass valve closed
3/6/2011	11:31:30 PM	Bubbler valve closed
3/6/2011	11:31:30 PM	Helium MFC set to  0.000000
3/6/2011	11:31:30 PM	H2 MFC set to  0.000000
3/6/2011	11:31:30 PM	BCl3 MFC set to  0.000000
3/6/2011	11:31:30 PM	PHl3 MFC set to  0.000000
3/6/2011	11:31:30 PM	SiCl4 MFC set to  0.000000
3/6/2011	11:31:30 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	11:31:30 PM	Tube furnace set to 0
3/6/2011	11:31:30 PM	Run finished at 11:31 PM
3/6/2011	11:33:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	11:33:35 PM	Recipe started at 11:33 PM
3/6/2011	11:33:35 PM	Helium valve closed
3/6/2011	11:33:35 PM	H2 valve closed
3/6/2011	11:33:35 PM	BCl3 valve closed
3/6/2011	11:33:35 PM	PH3 valve closed
3/6/2011	11:33:35 PM	SiCl4 pre valve closed
3/6/2011	11:33:35 PM	SiCl4 post valve closed
3/6/2011	11:33:35 PM	Main Vac valve closed
3/6/2011	11:33:35 PM	Bubbler valve closed
3/6/2011	11:33:35 PM	Bypass valve opened
3/6/2011	11:33:35 PM	Helium MFC set to  0.000000
3/6/2011	11:33:35 PM	H2 MFC set to  0.000000
3/6/2011	11:33:35 PM	BCl3 MFC set to  0.000000
3/6/2011	11:33:35 PM	PHl3 MFC set to  0.000000
3/6/2011	11:33:35 PM	SiCl4 MFC set to  0.000000
3/6/2011	11:33:35 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	11:33:35 PM	Tube furnace set to 0
3/6/2011	11:34:06 PM	Helium valve closed
3/6/2011	11:34:06 PM	H2 valve closed
3/6/2011	11:34:06 PM	BCl3 valve closed
3/6/2011	11:34:06 PM	PH3 valve closed
3/6/2011	11:34:06 PM	SiCl4 pre valve closed
3/6/2011	11:34:06 PM	SiCl4 post valve closed
3/6/2011	11:34:06 PM	Bubbler valve closed
3/6/2011	11:34:06 PM	Main Vac valve opened
3/6/2011	11:34:06 PM	Bypass valve opened
3/6/2011	11:34:06 PM	Helium MFC set to  0.000000
3/6/2011	11:34:06 PM	H2 MFC set to  0.000000
3/6/2011	11:34:06 PM	BCl3 MFC set to  0.000000
3/6/2011	11:34:06 PM	PHl3 MFC set to  0.000000
3/6/2011	11:34:06 PM	SiCl4 MFC set to  0.000000
3/6/2011	11:34:06 PM	Bypass solenoid MFC set to  0.000000
3/6/2011	11:34:06 PM	Tube furnace set to 0
3/6/2011	11:34:06 PM	Run finished at 11:34 PM
3/6/2011	11:34:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2011	11:34:22 PM	Helium MFC set to  100.000000
3/6/2011	11:34:23 PM	Helium valve opened
3/6/2011	11:35:06 PM	Helium valve closed
3/6/2011	11:35:08 PM	Helium MFC set to  0.000000
3/6/2011	11:36:17 PM	Helium MFC set to  100.000000
3/6/2011	11:36:18 PM	Helium valve opened
3/6/2011	11:36:38 PM	Helium valve closed
3/6/2011	11:36:40 PM	Helium MFC set to  0.000000
